High-performance carbon nanotube transistors on SrTiO3/Si substrates

被引:61
作者
Kim, BM
Brintlinger, T
Cobas, E
Fuhrer, MS
Zheng, HM
Yu, Z
Droopad, R
Ramdani, J
Eisenbeiser, K
机构
[1] Univ Maryland, Dept Phys, College Pk, MD 20742 USA
[2] Univ Maryland, Ctr Superconduct Res, College Pk, MD 20742 USA
[3] Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA
[4] Motorola Labs, Phys Sci Res Labs, Tempe, AZ USA
关键词
D O I
10.1063/1.1682691
中图分类号
O59 [应用物理学];
学科分类号
摘要
Single-walled carbon nanotubes (SWNTs) have been grown via chemical vapor deposition on high-kappa dielectric SrTiO3/Si substrates, and high-performance semiconducting SWNT field-effect transistors have been fabricated using the thin SrTiO3 as gate dielectric and Si as gate electrode. The transconductance per channel width is 8900 muS/mum. The high transconductance cannot be explained by the increased gate capacitance; it is proposed that the increased electric field at the nanotube-electrode interface due to the high-kappa SrTiO3 decreases or eliminates the nanotube-electrode Schottky barrier. (C) 2004 American Institute of Physics.
引用
收藏
页码:1946 / 1948
页数:3
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