Interfacial fracture for TiN/SiNx nano-multilayer coatings on Si(111) characterized by nanoindentation experiments

被引：17
作者：
An, T.
Wen, M.
Hu, C. Q.
Tian, H. W.
Zheng, W. T. [1 ]
机构：
[1] Jilin Univ, Dept Mat Sci, Key Lab Automobile Mat MOE, Changchun 130012, Peoples R China
来源：
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2008年 / 494卷 / 1-2期
基金：
美国国家科学基金会;
关键词：
TiN/SiNx nano-multilayer coatings; Interfacial fracture; Nanoindentation;
D O I：
10.1016/j.msea.2008.04.020
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Fracture behavior for TiN/SiNx nano-multilayer coatings on Si(111) substrates, deposited using magnetron sputtering Ti and Si, is characterized by nanoindentation experiments, and the morphologies of the indentations are revealed by scanning electron microscopy, along with in situ atomic force microscopy (AFM) in nanoindentation experiments. During nanoindentation experiments, under the condition that the displacement limit mode is used and a strain rate is kept at 0.05/s, an interfacial (between the coating and substrate) fracture is observed as the maximum indenter displacement into the coating reaches 2500 nm, and the corresponding unloading segment in the load-displacement curve shows an obvious discontinuity. This discontinuity is attributed to the rebound of the detached film during unloading. The interfacial fracture toughness for TiN/SiNx nano-multilayer coating on Si(111), which is strongly dependent on the preferred orientation for the TiN layer as well as the interfaces between TiN and SiNx layer in the multilayer stack, is calculated. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：324 / 328
页数：5
相关论文
共 21 条
[11]  
Lawn B., 1993, FRACTURE BRITTLE SOL
[12]   MEASUREMENT OF ADHERENCE OF RESIDUALLY STRESSED THIN-FILMS BY INDENTATION .1. MECHANICS OF INTERFACE DELAMINATION [J].
MARSHALL, DB ;
EVANS, AG .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (10) :2632-2638
[13]   AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS [J].
OLIVER, WC ;
PHARR, GM .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1564-1583
[14]  
Pocius A.V., 2021, Adhesion and Adhesives Technology, V3rd ed.
[15]   USE OF THE MICROINDENTATION TECHNIQUE FOR DETERMINING INTERFACIAL FRACTURE ENERGY [J].
ROSENFELD, LG ;
RITTER, JE ;
LARDNER, TJ ;
LIN, MR .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (07) :3291-3296
[16]   Epitaxial stabilization of cubic-SiNx in TiN/SiNx multilayers [J].
Soderberg, H ;
Odén, M ;
Larsson, T ;
Hultman, L ;
Molina-Aldareguia, JM .
APPLIED PHYSICS LETTERS, 2006, 88 (19)
[17]   Nanostructure formation during deposition of TiN/SiNx nanomultilayer films by reactive dual magnetron sputtering -: art. no. 114327 [J].
Söderberg, H ;
Odén, M ;
Molina-Aldareguia, JM ;
Hultman, L .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (11)
[18]   Growth and characterization of TiN/SiN(001) superlattice films [J].
Soederberg, Hans ;
Oden, Magnus ;
Flink, Axel ;
Birch, Jens ;
Persson, Per O. A. ;
Beckers, Manfred ;
Hultman, Lars .
JOURNAL OF MATERIALS RESEARCH, 2007, 22 (11) :3255-3264
[19]   RHEED studies during growth of TiN/SiNx/TiN trilayers on MgO(001) [J].
Soederberg, Hans ;
Birch, Jens ;
Hultman, Lars ;
Oden, Magnus .
SURFACE SCIENCE, 2007, 601 (11) :2352-2356
[20]   A simple technique for measuring the adhesion of brittle films to ductile substrates with application to diamond-coated titanium [J].
Vlassak, JJ ;
Drory, MD ;
Nix, WD .
JOURNAL OF MATERIALS RESEARCH, 1997, 12 (07) :1900-1910
123