Silicon on ultra-low-loss waveguide photonic integration platform

被引：124

作者：

Bauters, Jared F. ^{[1
]}

Davenport, Michael L. ^{[1
]}

Heck, Martijn J. R. ^{[1
]}

Doylend, J. K. ^{[1
]}

Chen, Arnold ^{[2
]}

Fang, Alexander W. ^{[2
]}

Bowers, John E. ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

[2] Aurrion Inc, Goleta, CA 93116 USA

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 01期

关键词：

D O I：

10.1364/OE.21.000544

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a novel integrated silicon and ultra-low-loss Si3N4 waveguide platform. Coupling between layers is achieved with (0.4 +/- 0.2) dB of loss per transition and a 20 nm 3-dB bandwidth for one tapered coupler design and with (0.8 +/- 0.2) dB of loss per transition and a 100 nm 3-dB bandwidth for another. The minimum propagation loss measured in the ultra-low-loss waveguides is 1.2 dB/m in the 1590 nm wavelength regime. (C) 2013 Optical Society of America

引用

页码：544 / 555

页数：12

共 19 条

[1] Low-loss polycrystalline silicon waveguides for silicon photonics
Agarwal, AM
Liao, L
Foresi, JS
Black, MR
Duan, XM
Kimerling, LC
[J]. JOURNAL OF APPLIED PHYSICS, 1996, 80 (11) : 6120 - 6123
[2] Monolithic integration of erbium-doped amplifiers with silicon-on-insulator waveguides
Agazzi, Laura
Bradley, Jonathan D. B.
Dijkstra, Meindert
Ay, Feridun
Roelkens, Gunther
Baets, Roel
Worhoff, Kerstin
Pollnau, Markus
[J]. OPTICS EXPRESS, 2010, 18 (26): : 27703 - 27711
[3] Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding
Bauters, Jared F.
Heck, Martijn J. R.
John, Demis D.
Barton, Jonathon S.
Bruinink, Christiaan M.
Leinse, Arne
Heideman, Rene G.
Blumenthal, Daniel J.
Bowers, John E.
[J]. OPTICS EXPRESS, 2011, 19 (24): : 24090 - 24101
[4] Ultra-low-loss high-aspect-ratio Si3N4 waveguides
Bauters, Jared F.
Heck, Martijn J. R.
John, Demis
Dai, Daoxin
Tien, Ming-Chun
Barton, Jonathon S.
Leinse, Arne
Heideman, Rene G.
Blumenthal, Daniel J.
Bowers, John E.
[J]. OPTICS EXPRESS, 2011, 19 (04): : 3163 - 3174
[5] Blumenthal D. J., 2012, P IPR
[6] Chen L., 2012, P OFC
[7] Photonic technologies for angular velocity sensing
Ciminelli, Caterina
Dell'Olio, Francesco
Campanella, Carlo E.
Armenise, Mario N.
[J]. ADVANCES IN OPTICS AND PHOTONICS, 2010, 2 (03): : 370 - 404
[8] Mode conversion in tapered submicron silicon ridge optical waveguides
Dai, Daoxin
Tang, Yongbo
Bowers, John E.
[J]. OPTICS EXPRESS, 2012, 20 (12): : 13425 - 13439
[9] Horikawa K., 1996, OFC'96. Optical Fiber Communication. Vol.2. 1996 Technical Digest Series. Conference Edition (IEEE Cat. No.96CH35901), P100, DOI 10.1109/OFC.1996.907678
[10] Ultra-low-loss optical delay line on a silicon chip
Lee, Hansuek
Chen, Tong
Li, Jiang
Painter, Oskar
Vahala, Kerry J.
[J]. NATURE COMMUNICATIONS, 2012, 3

← 1 2 →