Silicon on ultra-low-loss waveguide photonic integration platform

被引:125
作者
Bauters, Jared F. [1 ]
Davenport, Michael L. [1 ]
Heck, Martijn J. R. [1 ]
Doylend, J. K. [1 ]
Chen, Arnold [2 ]
Fang, Alexander W. [2 ]
Bowers, John E. [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Aurrion Inc, Goleta, CA 93116 USA
关键词
D O I
10.1364/OE.21.000544
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate a novel integrated silicon and ultra-low-loss Si3N4 waveguide platform. Coupling between layers is achieved with (0.4 +/- 0.2) dB of loss per transition and a 20 nm 3-dB bandwidth for one tapered coupler design and with (0.8 +/- 0.2) dB of loss per transition and a 100 nm 3-dB bandwidth for another. The minimum propagation loss measured in the ultra-low-loss waveguides is 1.2 dB/m in the 1590 nm wavelength regime. (C) 2013 Optical Society of America
引用
收藏
页码:544 / 555
页数:12
相关论文
共 19 条
[1]   Low-loss polycrystalline silicon waveguides for silicon photonics [J].
Agarwal, AM ;
Liao, L ;
Foresi, JS ;
Black, MR ;
Duan, XM ;
Kimerling, LC .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (11) :6120-6123
[2]   Monolithic integration of erbium-doped amplifiers with silicon-on-insulator waveguides [J].
Agazzi, Laura ;
Bradley, Jonathan D. B. ;
Dijkstra, Meindert ;
Ay, Feridun ;
Roelkens, Gunther ;
Baets, Roel ;
Worhoff, Kerstin ;
Pollnau, Markus .
OPTICS EXPRESS, 2010, 18 (26) :27703-27711
[3]   Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding [J].
Bauters, Jared F. ;
Heck, Martijn J. R. ;
John, Demis D. ;
Barton, Jonathon S. ;
Bruinink, Christiaan M. ;
Leinse, Arne ;
Heideman, Rene G. ;
Blumenthal, Daniel J. ;
Bowers, John E. .
OPTICS EXPRESS, 2011, 19 (24) :24090-24101
[4]   Ultra-low-loss high-aspect-ratio Si3N4 waveguides [J].
Bauters, Jared F. ;
Heck, Martijn J. R. ;
John, Demis ;
Dai, Daoxin ;
Tien, Ming-Chun ;
Barton, Jonathon S. ;
Leinse, Arne ;
Heideman, Rene G. ;
Blumenthal, Daniel J. ;
Bowers, John E. .
OPTICS EXPRESS, 2011, 19 (04) :3163-3174
[5]  
Blumenthal D. J., 2012, P IPR
[6]  
Chen L., 2012, P OFC
[7]   Photonic technologies for angular velocity sensing [J].
Ciminelli, Caterina ;
Dell'Olio, Francesco ;
Campanella, Carlo E. ;
Armenise, Mario N. .
ADVANCES IN OPTICS AND PHOTONICS, 2010, 2 (03) :370-404
[8]   Mode conversion in tapered submicron silicon ridge optical waveguides [J].
Dai, Daoxin ;
Tang, Yongbo ;
Bowers, John E. .
OPTICS EXPRESS, 2012, 20 (12) :13425-13439
[9]  
Horikawa K., 1996, OFC'96. Optical Fiber Communication. Vol.2. 1996 Technical Digest Series. Conference Edition (IEEE Cat. No.96CH35901), P100, DOI 10.1109/OFC.1996.907678
[10]   Ultra-low-loss optical delay line on a silicon chip [J].
Lee, Hansuek ;
Chen, Tong ;
Li, Jiang ;
Painter, Oskar ;
Vahala, Kerry J. .
NATURE COMMUNICATIONS, 2012, 3