Dynamic Analysis of Nonlinear Elasticity Microbeam with Electromechanical Couping

The material nonlinearity is one of the many nonlinear factors in MEMS(Micro Electro Mechanical System). The microbeam is a basic component in MEMS. In this paper, the influence of nonlinear elasticity factor has been considered in dynamic analysis of the microbeam. A nonlinear modal is set up that as a clamped-clamped microbeam subjected to a transverse electrostatic force. The nonlinear governing equation is transformed into a linear differential equation system through the use of Linstedt-Poincare perturbation method, which are then solved by using the Galerkin method. Numerical results show that, the nonlinear factor can't be ignored when the number of the nonlinear material constant, B is big. The amplitude and the period of the microbeam will increase when the number of B is increasing.