Tensile testing system for sub-micrometer thick film

被引：0
|
作者：
Tsuchiya, T [1 ]
Shikida, M [1 ]
Sato, K [1 ]
机构：
[1] Nagoya Univ, Dept Micro Syst Engn, Nagoya, Aichi 4648603, Japan
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
tensile test; electrostatic force grip; single crystal silicon;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A new type of tensile tester for sub-microirieter-thick films has been developed. The tester is has a grip that allows chucking one end of a thin-film specimen by electrostatic force while the other end is fixed to a silicon substrate. It uses a servo-controlled balance for small-force measurement. Sub-micrometer-thick single-crystal-silicon specimens were fabricated using bulk micromachining starting with a SIMOX wafer. The specimens were 0 to 300 mum long, 20 or 50 mum wide and 0.14 mum thick. The tensile strength ranged from 1.4 to 4.3 GPa for six samples; the longer the specimen the lower strength.
引用
收藏
页码：1378 / 1381
页数：4
相关论文
共 50 条
  • [21] Progress in sub-micrometer resolution computed tomography
    Nachtrab, Frank
    Salamon, Michael
    Burtzlaff, Susanne
    Voland, Virginia
    Porsch, Felix
    Johansson, Wiktor
    Uhlmann, Norman
    Hanke, Randolf
    2008 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE (2008 NSS/MIC), VOLS 1-9, 2009, : 5492 - +
  • [22] Etching of sub-micrometer structures through Stencil
    Villanueva, G.
    Vazquez-Mena, O.
    van den Boogaart, M. A. F.
    Sidler, K.
    Pataky, K.
    Savu, V.
    Brugger, J.
    MICROELECTRONIC ENGINEERING, 2008, 85 (5-6) : 1010 - 1014
  • [23] Technology of sub-micrometer MIM tunnel diodes
    Stonio, Bartlomiej
    Wisniewski, Piotr
    Haras, Maciej
    Sochacki, Mariusz
    PRZEGLAD ELEKTROTECHNICZNY, 2022, 98 (02): : 114 - 116
  • [24] Fast sub-micrometer interference lithography on Silicon
    Jiang, HB
    Grossmann, A
    Hansch, TW
    APPLIED PHYSICS B-LASERS AND OPTICS, 1998, 66 (04): : 523 - 525
  • [25] Sub-micrometer patterning of proteins by electric lithography
    Chang, Yu
    Ahn, Yong Sik
    Hahn, H. Thomas
    Chen, Yong
    LANGMUIR, 2007, 23 (08) : 4112 - 4114
  • [26] Focusing of sub-micrometer particles in microfluidic devices
    Zhang, Tianlong
    Hong, Zhen-Yi
    Tang, Shi-Yang
    Li, Weihua
    Inglis, David W.
    Hosokawa, Yoichiroh
    Yalikun, Yaxiaer
    Li, Ming
    LAB ON A CHIP, 2020, 20 (01) : 35 - 53
  • [27] Fast sub-micrometer interference lithography on Silicon
    H.-B. Jiang
    A. Grossmann
    T.W. Hänsch
    Applied Physics B, 1998, 66 : 523 - 525
  • [28] Selective Assembly of Sub-Micrometer Polymer Particles
    Kuemin, Cyrill
    Huckstadt, K. Cathrein
    Loertscher, Emanuel
    Rey, Antje
    Decker, Andrea
    Spencer, Nicholas D.
    Wolf, Heiko
    ADVANCED MATERIALS, 2010, 22 (25) : 2804 - +
  • [29] Sub-micrometer pyroelectric tomography of AlScN films
    Tappertzhofen, S.
    Bette, S.
    Sievers, F.
    Fichtner, S.
    Broeker, S.
    Schmitz-Kempen, T.
    APPLIED PHYSICS LETTERS, 2021, 118 (24)
  • [30] Long distance measurement with sub-micrometer accuracy
    Bhattacharya, N.
    Cui, M.
    Zeitouny, M. G.
    Urbach, H. P.
    van den Berg, S. A.
    2011 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTICAL SYSTEMS AND MODERN OPTOELECTRONIC INSTRUMENTS, 2011, 8197
12345