Broadband THz Uncooled Antenna-Coupled Microbolometer Array-Electromagnetic Design, Simulations and Measurements

被引：70

作者：

Duy-Thong Nguyen ^{[1
]}

Simoens, Francois ^{[1
]}

Ouvrier-Buffet, Jean-Louis ^{[1
]}

Meilhan, Jerome ^{[1
]}

Coutaz, Jean-Louis ^{[2
]}

机构：

[1] CEA Leti MINATEC, F-38054 Grenoble 9, France

[2] Univ Savoie, Lab IMEP LAHC, F-73376 Le Bourget Du Lac, France

来源：

IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY | 2012年 / 2卷 / 03期

关键词：

Antenna-coupled bolometer; electromagnetic simulation; Fourier transform spectrometer; spectral absorption; THz imaging;

D O I：

10.1109/TTHZ.2012.2188395

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Bolometer sensors are good candidates for THz imaging thanks to their maturity and capability to sense THz waves on the whole spectrum. Starting with infrared microbolometer technology, uncooled antenna-coupled microbolometer focal plane array are being developed at CEA-LETI with the objective of offering low-cost, real-time 2D terahertz imaging sensors. One of the major challenges is studying the optical coupling mechanism of the detector in THz frequency range. In this paper, we present results of the electromagnetic design and characterization process of these focal plane arrays, concentrating on the spectral absorption.

引用

页码：299 / 305

页数：7

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