Study of gaseous interactions in carbon nanotube field-effect transistors through selective Si3N4 passivation

被引:10
作者
Peng, Ning [1 ]
Zhang, Qing [1 ]
Tan, Ooi Kiang [1 ]
Marzari, Nicola [2 ]
机构
[1] Nanyang Technol Univ, Ctr Microelect, Sch Elect & Elect Engn, Singapore 639798, Singapore
[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
关键词
D O I
10.1088/0957-4484/19/46/465201
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Carbon nanotube field-effect transistors with Si3N4 passivated source and drain contacts and exposed carbon nanotube channel show n-type characteristics in air. In contrast, by passivating only the source contact, a diode-like behavior with a maximum current rectification ratio of 4.6 x 10(3) is observed. The rectifying characteristic vanishes in a vacuum but recovers once the devices are exposed to air. From our experiments, key parameters, such as critical gas pressure, adsorption energy of oxygen molecules and the contact barrier height modulation, can be obtained for studying the gaseous interaction in the carbon nanotube devices.
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收藏
页数:5
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共 33 条
[1]   Band-to-band tunneling in carbon nanotube field-effect transistors [J].
Appenzeller, J ;
Lin, YM ;
Knoch, J ;
Avouris, P .
PHYSICAL REVIEW LETTERS, 2004, 93 (19) :196805-1
[2]   Short-channel effects in contact-passivated nanotube chemical sensors [J].
Bradley, K ;
Gabriel, JCP ;
Star, A ;
Grüner, G .
APPLIED PHYSICS LETTERS, 2003, 83 (18) :3821-3823
[3]   An investigation of the mechanisms of electronic sensing of protein adsorption on carbon nanotube devices [J].
Chen, RJ ;
Choi, HC ;
Bangsaruntip, S ;
Yenilmez, E ;
Tang, XW ;
Wang, Q ;
Chang, YL ;
Dai, HJ .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2004, 126 (05) :1563-1568
[4]   Extreme oxygen sensitivity of electronic properties of carbon nanotubes [J].
Collins, PG ;
Bradley, K ;
Ishigami, M ;
Zettl, A .
SCIENCE, 2000, 287 (5459) :1801-1804
[5]   Controlling energy-level alignments at carbon nanotube/Au contacts [J].
Cui, XD ;
Freitag, M ;
Martel, R ;
Brus, L ;
Avouris, P .
NANO LETTERS, 2003, 3 (06) :783-787
[6]   Carbon nanotube inter- and intramolecular logic gates [J].
Derycke, V ;
Martel, R ;
Appenzeller, J ;
Avouris, P .
NANO LETTERS, 2001, 1 (09) :453-456
[7]   Controlling doping and carrier injection in carbon nanotube transistors [J].
Derycke, V ;
Martel, R ;
Appenzeller, J ;
Avouris, P .
APPLIED PHYSICS LETTERS, 2002, 80 (15) :2773-2775
[8]   Carbon nanotubes as Schottky barrier transistors [J].
Heinze, S ;
Tersoff, J ;
Martel, R ;
Derycke, V ;
Appenzeller, J ;
Avouris, P .
PHYSICAL REVIEW LETTERS, 2002, 89 (10)
[9]   Ballistic carbon nanotube field-effect transistors [J].
Javey, A ;
Guo, J ;
Wang, Q ;
Lundstrom, M ;
Dai, HJ .
NATURE, 2003, 424 (6949) :654-657
[10]   Electronic properties of oxidized carbon nanotubes [J].
Jhi, SH ;
Louie, SG ;
Cohen, ML .
PHYSICAL REVIEW LETTERS, 2000, 85 (08) :1710-1713