Compact prototype apparatus for reducing the circle of confusion down to 40 nm for x-ray nanotomography

被引：25

作者：

Kim, Jungdae ^{[1
,2
]}

Lauer, K. ^{[1
]}

Yan, H. ^{[1
]}

Chu, Y. S. ^{[1
]}

Nazaretski, E. ^{[1
]}

机构：

[1] Brookhaven Natl Lab, Natl Synchrotron Light Source 2, Upton, NY 11973 USA

[2] Univ Ulsan, Dept Phys, Ulsan 680749, South Korea

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2013年 / 84卷 / 03期

关键词：

MAGNETIC-RESONANCE; FIBEROPTIC INTERFEROMETER; FORCE MICROSCOPE;

D O I：

10.1063/1.4798546

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have constructed a compact prototype apparatus for active correction of circle of confusion during rotational motion. Our system combines fiber optic interferometry as a sensing element, the reference cylinder along with the nanopositioning system, and a robust correction algorithm. We demonstrate dynamic correction of run-out errors down to 40 nm; the resolution is limited by ambient environment and accuracy of correcting nanopositioners. Our approach provides a compact solution for in-vacuum scanning nanotomography x-ray experiments with a potential to reach sub-nm level of correction. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798546]

引用

页数：4

共 15 条

[1] Thermal tuning of a fiber-optic interferometer for maximum sensitivity [J].

Bruland, KJ ;

Garbini, JL ;

Dougherty, WM ;

Chao, SH ;

Jensen, SE ;

Sidles, JA .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (09) :3542-3544

[2] Real space soft x-ray imaging at 10 nm spatial resolution [J].

Chao, W. ;

Fischer, P. ;

Tyliszczak, T. ;

Rekawa, S. ;

Anderson, E. ;

Naulleau, P. .

OPTICS EXPRESS, 2012, 20 (09) :9777-9783

[3] FIBER-OPTIC INTERFEROMETER FOR REMOTE SUBANGSTROM VIBRATION MEASUREMENT [J].

DRAKE, AD ;

LEINER, DC .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1984, 55 (02) :162-165

[4] An instrument for 3D x-ray nano-imaging [J].

Holler, M. ;

Raabe, J. ;

Diaz, A. ;

Guizar-Sicairos, M. ;

Quitmann, C. ;

Menzel, A. ;

Bunk, O. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (07)

[5] The Race to X-ray Microbeam and Nanobeam Science [J].

Ice, Gene E. ;

Budai, John D. ;

Pang, Judy W. L. .

SCIENCE, 2011, 334 (6060) :1234-1239

[6] Nanometer linear focusing of hard x rays by a multilayer Laue lens [J].

Kang, HC ;

Maser, J ;

Stephenson, GB ;

Liu, C ;

Conley, R ;

Macrander, AT ;

Vogt, S .

PHYSICAL REVIEW LETTERS, 2006, 96 (12)

[7] Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens [J].

Kang, Hyon Chol ;

Yan, Hanfei ;

Winarski, Robert P. ;

Holt, Martin V. ;

Maser, Joerg ;

Liu, Chian ;

Conley, Ray ;

Vogt, Stefan ;

Macrander, Albert T. ;

Stephenson, G. Brian .

APPLIED PHYSICS LETTERS, 2008, 92 (22)

[8] Design of a variable temperature scanning force microscope [J].

Nazaretski, E. ;

Graham, K. S. ;

Thompson, J. D. ;

Wright, J. A. ;

Pelekhov, D. V. ;

Hammel, P. C. ;

Movshovich, R. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (08)

[9] MECHANICAL DETECTION OF MAGNETIC-RESONANCE [J].

RUGAR, D ;

YANNONI, CS ;

SIDLES, JA .

NATURE, 1992, 360 (6404) :563-566

[10] IMPROVED FIBER-OPTIC INTERFEROMETER FOR ATOMIC FORCE MICROSCOPY [J].

RUGAR, D ;

MAMIN, HJ ;

GUETHNER, P .

APPLIED PHYSICS LETTERS, 1989, 55 (25) :2588-2590

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