Design of Ultra-High Sensitivity Slot Micro-ring Resonator Acoustic Sensor

被引：2

作者：

Chu, Xiaoxia ^{[1
]}

Cui, Jiangong ^{[1
]}

Zhu, Min ^{[1
]}

Zhao, Rongyu ^{[1
]}

Zhang, Wendong ^{[1
]}

Zhang, Guojun ^{[1
]}

Wang, Renxin ^{[1
]}

Yang, Yuhua ^{[1
]}

Ren, Yongfeng ^{[1
]}

机构：

[1] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China

来源：

FIBER AND INTEGRATED OPTICS | 2022年 / 41卷 / 3-4期

基金：

中国国家自然科学基金;

关键词：

Acoustic detection; PDMS; slot micro-ring resonator; ultra-high sensitivity;

D O I：

10.1080/01468030.2022.2145529

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A slot microring resonator acoustic sensor (MRAS) using the PDMS package was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection principle of the sensor is analyzed theoretically, the structural parameters are optimized and the performance of the sensor is verified by simulation. The simulation results show that the proposed slot MRAS has a high-quality factor of 1.49 x 10(6), the sensitivity of the sensor by intensity detection method is up to 3872 mV/kPa, and the 3 dB bandwidth is 210 MHz. The sensor designed in this paper has the advantages of ultra-high sensitivity and wide bandwidth range, which has important value in the field of acoustic detection.

引用

页码：83 / 95

页数：13

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