共 43 条
[2]
An Y., 2012, VAC SCI TECHNOL B, V30
[6]
Bae S, 2010, NAT NANOTECHNOL, V5, P574, DOI [10.1038/nnano.2010.132, 10.1038/NNANO.2010.132]
[7]
Nanolithographic patterning of transparent, conductive single-walled carbon nanotube films by inductively coupled plasma reactive ion etching
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2007, 25 (02)
:348-354