THEORETICAL ANALYSIS AND EXPERIMENTAL STUDY OF CARBON NANOTUBE PROBE AND CONVENTIONAL ATOMIC FORCE MICROSCOPY PROBE ON SURFACE ROUGHNESS

被引:1
作者
Wang Jinghe [1 ]
Wang Hongxiang [1 ]
Xu Zongwei [1 ]
Dong Shen [1 ]
Wang Shiqian [1 ]
Zhang Huali [1 ]
机构
[1] Harbin Inst Technol, Ctr Precis Engn, Harbin 150001, Peoples R China
关键词
Atomic force microscope; Carbon nanotube probes; Fractal dimension;
D O I
10.3901/CJME.2008.05.062
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
In this paper, three different tips are employed, i.e., the carbon nanotube tip, monocrystalline silicon tip and silicon nitride tip. Resorting to atomic force microscope (AFM), they are used for measuring the surface toughness of indium tin oxide (ITO) film and the immunoglobulin G (IgG) proteins within the scanning area of 10 mu mx10 Inn and 0.5 mu mx0.5 mu m, respectively. Subsequently, the scanned surface of the ITO film and IgG proteins are analyzed by using fractal dimension. The results show that the fractal dimension measured by carbon nanotube tip is biggest with the highest frequency components and the most microscopic information. Therefore, the carbon nanotube tip is the ideal measuring tool for measuring super-smooth surface, which will play a more and more important role in the high-resolution imaging field.
引用
收藏
页码:62 / 64
页数:3
相关论文
共 11 条
[1]  
AJUMDAR AM, 1990, ASME TRIBOLOGY, V112, P205
[2]  
Aue J, 1997, APPL PHYS LETT, V71, P1347, DOI 10.1063/1.120415
[3]  
CATTIEN VN, 2004, PHYS CHEM, V108, P2816
[4]   Nanotubes as nanoprobes in scanning probe microscopy [J].
Dai, HJ ;
Hafner, JH ;
Rinzler, AG ;
Colbert, DT ;
Smalley, RE .
NATURE, 1996, 384 (6605) :147-150
[5]   Structural flexibility of carbon nanotubes [J].
Iijima, S ;
Brabec, C ;
Maiti, A ;
Bernholc, J .
JOURNAL OF CHEMICAL PHYSICS, 1996, 104 (05) :2089-2092
[6]   RECONSTRUCTION OF STM AND AFM IMAGES DISTORTED BY FINITE-SIZE TIPS [J].
KELLER, D .
SURFACE SCIENCE, 1991, 253 (1-3) :353-364
[7]   Comparison of wear characteristics of etched-silicon and carbon nanotube atomic-force microscopy probes [J].
Larsen, T ;
Moloni, K ;
Flack, F ;
Eriksson, MA ;
Lagally, MG ;
Black, CT .
APPLIED PHYSICS LETTERS, 2002, 80 (11) :1996-1998
[8]   3D FRACTAL-BASED CHARACTERIZATION FOR ENGINEERED SURFACE-TOPOGRAPHY [J].
LOPEZ, J ;
HANSALI, G ;
ZAHOUANI, H ;
LEBOSSE, JC ;
MATHIA, T .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 1995, 35 (02) :211-217
[9]   Carbon nanotube tipped atomic force microscopy for measurement of <100 nm etch morphology on semiconductors [J].
Nagy, G ;
Levy, M ;
Scarmozzino, R ;
Osgood, RM ;
Dai, H ;
Smalley, RE ;
Michaels, CA ;
Flynn, GW ;
McLane, GF .
APPLIED PHYSICS LETTERS, 1998, 73 (04) :529-531
[10]   SOME ASPECTS OF SURFACE-ROUGHNESS MEASUREMENT [J].
NAYAK, PR .
WEAR, 1973, 26 (02) :165-174