Hydrogen plasma passivation and improvement of the photovoltaic properties of a GaAs solar cell grown on Si substrate

被引:9
作者
Wang, G
Ohtsuka, K
Soga, T
Jimbo, T
Umeno, M
机构
[1] Nagoya Inst Technol, Dept Elect & Comp Engn, Showa Ku, Nagoya, Aichi 4668555, Japan
[2] Nagoya Inst Technol, Dept Environm Technol & Urban Planning, Showa Ku, Nagoya, Aichi 4668555, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 6A期
关键词
GaAs-on-Si solar cell; H plasma passivation; AsH3; postannealing; conversion efficiency;
D O I
10.1143/JJAP.38.3504
中图分类号
O59 [应用物理学];
学科分类号
摘要
The effects of hydrogen (H) plasma passivation of metalorganic chemical vapor deposition (MOCVD) grown GaAs solar cells on a Si substrate have been studied. After H plasma passivation and postannealing in AsH3 ambient, the conversion efficiency of the GaAs solar cell grown on a Si substrate is increased from 16.3 to 17.2% at AM0. This improvement is thought to be due to the passivation of the; defect-associated recombination centers by H plasma exposure and the recovery of the plasma-induced damages by postannealing the passivated solar cells in AsH3 ambient at 450 degrees C.
引用
收藏
页码:3504 / 3505
页数:2
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