Model-free deflectometry for freeform optics measurement using an iterative reconstruction technique

被引：47

作者：

Graves, Logan R. ^{[1
]}

Choi, Heejoo ^{[1
]}

Zhao, Wenchuan ^{[2
]}

Oh, Chang Jin ^{[1
]}

Su, Peng ^{[3
]}

Su, Tianquan ^{[4
]}

Kim, Dae Wook ^{[1
,5
]}

机构：

[1] Univ Arizona, Coll Opt Sci, 1630 E Univ Blvd, Tucson, AZ 85721 USA

[2] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China

[3] ASML Corp, 77 Danbury Rd, Wilton, CT 06897 USA

[4] KLA Tencor Corp, 3 Technol Dr, Miltipas, CA 95035 USA

[5] Univ Arizona, Steward Observ, 933 N Cherry Ave, Tucson, AZ 85719 USA

来源：

OPTICS LETTERS | 2018年 / 43卷 / 09期

关键词：

Interferometry - Data handling - Processing - Surface reconstruction;

D O I：

10.1364/OL.43.002110

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a novel model-free iterative data-processing approach that improves surface reconstruction accuracy for deflectometry tests of unknown surfaces. This new processing method iteratively reconstructs the surface, leading to reduced error in the final reconstructed surface. The method was implemented in a deflectometry system, and a freeform surface was tested and compared to interferometric test results. The reconstructed departure from interferometric results was reduced from 15.80 mu m RMS with model-based deflectometry down to 5.20 mu m RMS with the iterative technique reported here. (C) 2018 Optical Society of America

引用

页码：2110 / 2113

页数：4

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