A compact cantilever-based photoacoustic sensor for trace-gas detection

被引：0

作者：

de Cumis, Mario Siciliani ^{[1
,2
,3
]}

Garcia, Inaki Lopez ^{[2
,3
]}

Canino, Mariaconcetta ^{[4
]}

Pastor, Pablo Cancio ^{[2
,3
]}

Bonafe, Filippo ^{[4
]}

Roncaglia, Alberto

Borri, Simone ^{[2
,3
,5
]}

De Natale, Paolo ^{[2
,3
,5
]}

机构：

[1] ASI Agenzia Spaziale Italiana, Ctr Geodesia Spaziale, I-75100 Localita Terlecchia, Matera, Italy

[2] CNR, INO, Ist Nazl Ott, Largo E Fermi 6, I-50125 Florence, Italy

[3] LENS, Via N Carrara 1, I-50019 Sesto Fiorentino, FI, Italy

[4] CNR, IMM, Inst Microelect & Microsyst, Via P Gobetti 101, Bologna, Italy

[5] Ist Nazl Fis Nucl, Sez Firenze, I-50019 Sesto Fiorentino, FI, Italy

来源：

QUANTUM SENSING AND NANO ELECTRONICS AND PHOTONICS XVII | 2020年 / 11288卷

关键词：

Photoacoustic spectroscopy; gas trace sensing; cantilever-enhanced PAS; HIGH-SENSITIVITY; SPECTROMETER; FABRICATION;

D O I：

10.1117/12.2545824

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the development and the first characterization of a compact trace-gas sensor based on cantilever photoacoustic spectroscopy (CEPAS). The sensor was characterized in order to find the optimal operating parameters (pressure, molecule absorption line and laser modulated frequency). N2O was selected as test molecule. A quality factor of 200 at 10 mbar of cell pressure were determined. Furthermore, the first test measurements showed a minimum detection level of hundreds of ppb with integration time of 30 ms.

引用

页数：7

共 24 条

[1] Linestrength ratio spectroscopy as a new primary thermometer for redefined Kelvin dissemination [J].

Amato, Luigi Santamaria ;

de Cumis, Mario Siciliani ;

Bianco, Giuseppe ;

Pastore, Raffaele ;

Pastor, Pablo Cancio .

NEW JOURNAL OF PHYSICS, 2019, 21 (11)

[2] Intracavity quartz-enhanced photoacoustic sensor [J].

Borri, S. ;

Patimisco, P. ;

Galli, I. ;

Mazzotti, D. ;

Giusfredi, G. ;

Akikusa, N. ;

Yamanishi, M. ;

Scamarcio, G. ;

De Natale, P. ;

Spagnolo, V. .

APPLIED PHYSICS LETTERS, 2014, 104 (09)

[3] Tracing part-per-billion line shifts with direct-frequency-comb Vernier spectroscopy [J].

de Cumis, M. Siciliani ;

Eramo, R. ;

Coluccelli, N. ;

Cassinerio, M. ;

Galzerano, G. ;

Laporta, P. ;

De Natale, P. ;

Pastor, P. Cancio .

PHYSICAL REVIEW A, 2015, 91 (01)

[4] Radiation pressure excitation and cooling of a cryogenic micro-mechanical systems cavity [J].

de Cumis, Mario Siciliani ;

Farsi, Alessandro ;

Marino, Francesco ;

D'Arrigo, Giuseppe ;

Marin, Francesco ;

Cataliotti, Francesco Saverio ;

Rimini, Emanuele .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (01)

[5] Photothermal and thermo-refractive effects in high reflectivity mirrors at room and cryogenic temperature [J].

Farsi, Alessandro ;

de Cumis, Mario Siciliani ;

Marino, Francesco ;

Marin, Francesco .

JOURNAL OF APPLIED PHYSICS, 2012, 111 (04)

[6] The HITRAN2016 molecular spectroscopic database [J].

Gordon, I. E. ;

Rothman, L. S. ;

Hill, C. ;

Kochanov, R. V. ;

Tan, Y. ;

Bernath, P. F. ;

Birk, M. ;

Boudon, V. ;

Campargue, A. ;

Chance, K. V. ;

Drouin, B. J. ;

Flaud, J. -M. ;

Gamache, R. R. ;

Hodges, J. T. ;

Jacquemart, D. ;

Perevalov, V. I. ;

Perrin, A. ;

Shine, K. P. ;

Smith, M. -A. H. ;

Tennyson, J. ;

Toon, G. C. ;

Tran, H. ;

Tyuterev, V. G. ;

Barbe, A. ;

Csaszar, A. G. ;

Devi, V. M. ;

Furtenbacher, T. ;

Harrison, J. J. ;

Hartmann, J. -M. ;

Jolly, A. ;

Johnson, T. J. ;

Karman, T. ;

Kleiner, I. ;

Kyuberis, A. A. ;

Loos, J. ;

Lyulin, O. M. ;

Massie, S. T. ;

Mikhailenko, S. N. ;

Moazzen-Ahmadi, N. ;

Mueller, H. S. P. ;

Naumenko, O. V. ;

Nikitin, A. V. ;

Polyansky, O. L. ;

Rey, M. ;

Rotger, M. ;

Sharpe, S. W. ;

Sung, K. ;

Starikova, E. ;

Tashkun, S. A. ;

Vander Auwera, J. .

JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 2017, 203 :3-69

[7]

Harren F.J. M., 2000, Encyclopedia of Analytical Chemistry, V3, P2203, DOI [DOI 10.1002/9780470027318.A0718.PUB3, 10.1002/9780470027318.a0718.pub3]

[8]

HERING P, 2005, LASER ENV LIFE SCI

[9] High sensitivity in gas analysis with photoacoustic detection [J].

Kauppinen, J ;

Wilcken, K ;

Kauppinen, I ;

Koskinen, V .

MICROCHEMICAL JOURNAL, 2004, 76 (1-2) :151-159

[10] Cantilever enhanced photoacoustic detection of carbon dioxide using a tunable diode laser source [J].

Koskinen, V. ;

Fonsen, J. ;

Roth, K. ;

Kauppinen, J. .

APPLIED PHYSICS B-LASERS AND OPTICS, 2007, 86 (03) :451-454

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