Characterization of Pt/multiferroic BiFeO3/(Ba,Sr)TiO3/Si stacks for nonvolatile memory applications

被引:19
作者
Yeh, Chia-Shiu [1 ]
Wu, Jenn-Ming [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
关键词
D O I
10.1063/1.3001800
中图分类号
O59 [应用物理学];
学科分类号
摘要
The Pt/BiFeO3(BFO)/(Ba,Sr)TiO3(BST)/Si metal-ferroelectric-insulator/Si (MFIS) structures were fabricated by rf-magnetron sputtering. The electric properties of the BFO ferroelectric film with BST insulating buffer on Si substrates were investigated. BST demonstrates excellent insulating properties on Si substrates. The MFIS structure exhibits clockwise capacitance-voltage hysteresis loops due to the ferroelectric polarization of BFO. The maximum memory window of the MFIS is 3.86 V, which is a remarkable improvement in comparison with previously reported 0.8 V. Trapped charge and charge injection are found to initiate when the sweeping voltage is higher than 8 and 9 V, respectively. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.3001800]
引用
收藏
页数:3
相关论文
共 13 条
[1]   Characterization of metal-ferroelectric (BiFeO3)-insulator (ZrO2)-silicon capacitors for nonvolatile memory applications [J].
Chiang, Yu-Wei ;
Wu, Jenn-Ming .
APPLIED PHYSICS LETTERS, 2007, 91 (14)
[2]   The effect of ZrO2 buffer layer on electrical properties in Pt/SrBi2Ta2O9/ZrO2/Si ferroelectric gate oxide structure [J].
Choi, HS ;
Kim, EH ;
Choi, IH ;
Kim, YT ;
Choi, JH ;
Lee, JY .
THIN SOLID FILMS, 2001, 388 (1-2) :226-230
[3]   Low-temperature growth and characterization of epitaxial YMnO3/Y2O3/Si MFIS capacitors with thinner insulator layer [J].
Haratake, K ;
Shigemitsu, N ;
Nishijima, M ;
Yoshimura, T ;
Fujimura, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (9B) :6977-6980
[4]   A new metal-ferroelectric (PbZr0.53Ti0.47O3)-insulator (Dy2O3)-semiconductor (MFIS) FET for nonvolatile memory applications [J].
Juan, TPC ;
Chang, CY ;
Lee, JYM .
IEEE ELECTRON DEVICE LETTERS, 2006, 27 (04) :217-220
[5]   Ferroelectric DRAM (FEDRAM) FET with metal/SrBi2Ta2O9/SiN/Si gate structure [J].
Kim, KH ;
Han, JP ;
Jung, SW ;
Ma, TP .
IEEE ELECTRON DEVICE LETTERS, 2002, 23 (02) :82-84
[6]   Physical characteristics and electrical properties of Sr0.8Bi2+xTa2O9 films on Al2O3/Si annealed at high temperature [J].
Lan, BC ;
Huang, CY ;
Chen, SY .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (10) :6735-6740
[7]   Studies on leakage mechanisms and electrical properties of doped BiFeO3 films [J].
Lee, Chia-Ching ;
Wu, Jenn-Ming .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2007, 10 (08) :G58-G61
[8]   Characteristics of Pt/Bi3.25La0.75Ti3O12/ZrO2/Si structures using ZrO2 as buffer layers for ferroelectric-gate field-effect transistors [J].
Lee, JM ;
Kim, KT ;
Kim, CI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04) :1739-1742
[9]   Characteristics of metal-ferroelectric-insulator-silicon structures with ferroelectric (Pb0.8Ba0.2)ZrO3 thin films and (Ba0.5Sr0.5)TiO3 buffer layer [J].
Liu, CH ;
Wu, JM ;
Wu, LJ .
APPLIED PHYSICS LETTERS, 2006, 88 (12)
[10]   PHYSICS OF THE FERROELECTRIC NONVOLATILE MEMORY FIELD-EFFECT TRANSISTOR [J].
MILLER, SL ;
MCWHORTER, PJ .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (12) :5999-6010