共 50 条
- [21] Comparison of modulus and density measurements by nanoindentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric ADVANCED METALLIZATION CONFERENCE 2004 (AMC 2004), 2004, : 457 - 462
- [22] Impact of etching kinetics on the roughening of thermal SiO2 and low-k dielectric coral films in fluorocarbon plasmas JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (04): : 802 - 811
- [24] Non-destructive characterisation of porosity and pore size distribution in porous low-k dielectric films SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 352 - 357
- [25] Sol-gel deposited xerogel, aerogel and porogen based porous low-k thin films: A comparative investigation INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2021, 35 (14N16):
- [26] Theoretical analysis of Young's modulus and dielectric constant for low-k porous silicon dioxide films PROGRESSES IN FRACTURE AND STRENGTH OF MATERIALS AND STRUCTURES, 1-4, 2007, 353-358 : 2920 - +
- [27] Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation Okudur, O.O. (oguzhan.orkut.okudur@imec.be), 1600, American Institute of Physics Inc. (119):
- [29] Preparation and characterization of high porosity SiO2 xerogels for low k dielectrics LOW-DIELECTRIC CONSTANT MATERIALS V, 1999, 565 : 211 - 216