Nondestructive quantitative dopant profiling technique by contact radiography

被引:36
|
作者
Huang, H.
Stephens, R. B.
Eddinger, S. A.
Gunther, J.
Nikroo, A.
Chen, K. C.
Xu, H. W.
机构
[1] Gen Atom Co, San Diego, CA 92186 USA
[2] Lawrence Livermore Natl Lab, Livermore, CA 94551 USA
关键词
D O I
10.13182/FST49-650
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
We have developed the only non-destructive technique to profile graded dopants in ICF shells to the precision required by the NIF specifications (Doping level must be accurate to 0.03 at. % and its radial distribution accurate to submicron precision). This quantitative contact radiography method was based on precision film digitization and a dopant simulation model. The measurements on Cu/Be and Ge/CH shells agree with those from electron microprobe and X-ray fluorescence.
引用
收藏
页码:650 / 656
页数:7
相关论文
共 50 条
  • [21] NONDESTRUCTIVE DETERMINATION OF GRADE OF BERYLLIUM BY RADIOGRAPHY
    ABELES, C
    WARAKSA, I
    MATERIALS EVALUATION, 1966, 24 (03) : 155 - &
  • [22] Neutron radiography: Nondestructive testing by neutrons
    Yasuda, Ryo
    Journal of Japan Institute of Electronics Packaging, 2012, 15 (07) : 565 - 570
  • [23] DYNAMIC RADIOGRAPHY FOR NONDESTRUCTIVE TESTING.
    Kenney, E.S.
    Jacobs, A.M.
    1600, Academic Press, New York, NY (03):
  • [24] NEUTRON RADIOGRAPHY AS A NONDESTRUCTIVE TOOL IN ARCHEOLOGY
    ROBERTSON, TJM
    NON-DESTRUCTIVE TESTING, 1975, 8 (01): : 17 - 20
  • [25] Surface and tip characterization for quantitative two dimensional dopant profiling by scanning capacitance microscopy
    Zavyalov, VV
    McMurray, JS
    Williams, CC
    CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 753 - 756
  • [26] Validation of quantitative digital subtraction radiography using the EGAD impression technique
    Hausmann, E
    Allen, K
    Cavanaugh, PF
    Buchanan, W
    JOURNAL OF DENTAL RESEARCH, 1996, 75 : 1111 - 1111
  • [27] QUANTITATIVE DEPTH PROFILING BY AUGER ION SPUTTERING TECHNIQUE
    HO, PS
    LEWIS, JE
    HOWARD, JK
    WILDMAN, WS
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (08) : C248 - C248
  • [28] Nondestructive soluble solids content estimation with quantitative x-ray radiography using the grating interferometry
    Jiang, Xiaolei
    Zhang, Li
    Zhang, Ran
    Zhu, Xiaohua
    2014 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE (NSS/MIC), 2014,
  • [29] Secondary electron imaging as a two-dimensional dopant profiling technique: review and update
    Venables, D.
    Jain, H.
    Collins, D.C.
    Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1998, 16 (01):
  • [30] Secondary electron imaging as a two-dimensional dopant profiling technique: Review and update
    Venables, D
    Jain, H
    Collins, DC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (01): : 362 - 366