A simplified model joining the sheath and the plasma in electronegative plasmas

被引：5

作者：

Palop, JIF ^{[1
]}

Ballesteros, J ^{[1
]}

Hernández, MA ^{[1
]}

Crespo, RM ^{[1
]}

Del Pino, SB ^{[1
]}

机构：

[1] Univ Cordoba, Dept Fis, E-14071 Cordoba, Spain

来源：

CZECHOSLOVAK JOURNAL OF PHYSICS | 2004年 / 54卷 / 02期

关键词：

sheath; electronegative plasma; Langmuir probe; Bohm criterion;

D O I：

10.1023/B:CJOP.0000014404.80357.d3

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An extension of the previous work which only dealt with the sheath zone is used to analyze the wall-plasma interaction in electronegative plasmas. Ionization is introduced as the presheath mechanism. This extension includes the joining of the sheath and the plasma solutions. For certain plasma parameters a stratified presheath is obtained. In this case, the plasma and the sheath solutions are matched in a very simplified way, by introducing a discontinuity in the electric field. This discontinuity is equivalent to consideration of a negatively charged layer between the presheath and the sheath. The parameter space region in which this matching should be made has been delimited. The model includes the previous one in the limiting case of no ionization..

引用

页码：225 / 238

页数：14

共 11 条

[1] BOUNDARIES AND PROBES IN ELECTRONEGATIVE PLASMAS [J].

BRAITHWAITE, NS ;

ALLEN, JE .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (12) :1733-1737

[2]

FERNANDEZ JI, 2002, J APPL PHYS, V91, P2587

[3] The plasma-wall boundary region in negative-ion-dominated plasmas at low pressures [J].

Franklin, RN .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2000, 9 (02) :191-198

[4] Are the oscillations found in electronegative plasmas at low pressure an artefact? [J].

Franklin, RN ;

Snell, J .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2000, 33 (16) :1990-1995

[5] The low-pressure positive column in electronegative gases including space charge-matching plasma and sheath [J].

Franklin, RN ;

Snell, J .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (19) :2532-2542

[6] The fluid model of the positive column of a discharge with negative ions at low pressure joining plasma and sheath [J].

Franklin, RN .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (16) :L71-L74

[7] Formation of an oscillatory potential structure at the plasma boundary in electronegative plasmas [J].

Kono, A .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1999, 32 (12) :1357-1363

[8] Complex sheath formation around a spherical electrode in electronegative plasmas: a comparison between a fluid model and a particle simulation [J].

Kono, A .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (07) :1083-1090

[9] THE BOHM CRITERION AND SHEATH FORMATION [J].

RIEMANN, KU .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1991, 24 (04) :493-518

[10] FORMATION OF PRESHEATH AND CURRENT-FREE DOUBLE-LAYER IN A 2-ELECTRON-TEMPERATURE PLASMA [J].

SATO, K ;

MIYAWAKI, F .

PHYSICS OF FLUIDS B-PLASMA PHYSICS, 1992, 4 (05) :1247-1254

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