Grating images of a multi-phase grating optical low-pass filter

被引:0
|
作者
Go, CS [1 ]
Lee, JC [1 ]
Oh, YH [1 ]
Lim, SW [1 ]
Kim, SH [1 ]
机构
[1] Wonkwang Univ, Div Phys & Semicond Sci, Seoul 570749, South Korea
关键词
gating optical low-pass filter; GOLF; Moire fringe; Fresnel diffraction; phase grating;
D O I
10.1117/12.446575
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The grating optical low-pass filter (GOLF) has lots of advantages over traditional birefringent low-pass filter. But, one disadvantage of it is that the shadow image of the grating is visible, especially when the numerical aperture of a camera is large. We found that we can reduce the visibility of a grating image, if we adopted a multi-phase grating instead of a two-phase grating. First, from the simulation of the Fresnel diffraction pattern of a one-dimensional multi-phase grating, we found the optimum width and phase of each grating step that minimizes the modulation of the Fresnel diffraction. And then, we designed a two-dimensional multi-phase GOLF by extrapolating one dimension structure. Four types of GOLF, four-phase, seven-phase, eight-phase, and also two-phase GOLF were manufactured with a semiconductor process. Finished GOLF samples were installed to a digital camera to take pictures of a test target and compare them with each other. Experiment results show that as the number of phase step increases, the grating image becomes more indistinctive.
引用
收藏
页码:417 / 422
页数:6
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