Fabrication and piezoresistance of high temperature ITO thin film strain gauge

被引：0

作者：

Yang Shen-yong ^{[1
]}

Zhang Cong-chun ^{[1
]}

Yang Zhuo-qing ^{[1
]}

Li Hong-fang ^{[1
]}

Yao Jin-yuan ^{[1
]}

Huang Man-guo ^{[2
]}

Wang Hong ^{[1
]}

Ding Gui-fu ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

[2] AVIC Beijing Changcheng Aeronaut Measurement & Co, Beijing 101111, Peoples R China

来源：

CAILIAO GONGCHENG-JOURNAL OF MATERIALS ENGINEERING | 2020年 / 48卷 / 04期

关键词：

ITO thin film strain gauge; heat treatment; high temperature strain measurement; temperature coefficient of resistance; PRESSURE;

D O I：

10.11868/j.issn.1001-4381.2018.000875

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High temperature thin film strain gauges are widely used in the strain measurement of extreme conditions, especially in the high temperature components. ITO thin film strain gauges can generally be applied to the strain measurements above 1000 degrees C. ITO high temperature thin film strain gauge was fabricated on the ceramic substrate using magnetron sputtering, and then was thermal treated at high temperature in pure N-2 atmosphere, with the purpose of studying its microstructure, XPS, temperature resistance characteristics and piezoresistive response. The results show that the temperature coefficient of resistance (TCR) of ITO thin film strain gauge can stabilize at -750 X 10(-6) degrees C-1. In addition, ITO thin film strain gauge is loaded at 1200 degrees C, and the results show that the drift rate is 0. 0018 h(-1) and the strain factor is 16. Stable TCR and low drift rate of ITO thin film strain gauge provide the possibility for its application in the strain measurement of the hot end components.

引用

页码：145 / 150

页数：6

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