Improvement of the precision of lattice parameter determination by nano-beam electron diffraction

被引：10

作者：

Saitoh, Koh ^{[1
]}

Nakahara, Hirotaka ^{[2
]}

Tanaka, Nobuo ^{[1
]}

机构：

[1] Nagoya Univ, EcoTopia Sci Inst, Nagoya, Aichi 4648601, Japan

[2] Nagoya Univ, Dept Crystalline Mat Sci, Nagoya, Aichi 4648601, Japan

来源：

MICROSCOPY | 2013年 / 62卷 / 05期

关键词：

nano-beam electron diffraction; lattice parameter determination; lattice strain; interface; semiconductor; HOLZ LINES; STRAIN; SUBSTRATE; FIELD;

D O I：

10.1093/jmicro/dft023

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A highly precise determination of lattice parameters using higher-order Laue zone (HOLZ) reflections observed in nano-beam electron diffraction is presented. The introduction of more than 40 HOLZ reflections, whose positions are corrected by considering the aberration of the electron optics and are determined with an accuracy of 0.04 nm(-1), allows us to achieve a remarkable high precision of a 0.02% error, which is four times higher than the precision without HOLZ reflections.

引用

页码：533 / 539

页数：7

共 19 条

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