Thermal expansion coefficients of β-Ga2O3 single crystals

被引:61
|
作者
Orlandi, Fabio [1 ]
Mezzadri, Francesco [1 ]
Calestani, Gianluca [1 ]
Boschi, Francesco [2 ]
Fornari, Roberto [2 ]
机构
[1] Univ Parma, Dept Chem, I-43124 Parma, Italy
[2] Univ Parma, Dept Phys & Earth Sci, I-43124 Parma, Italy
关键词
VAPOR-PHASE EPITAXY; BETA-GALLIUM OXIDE; THIN-FILMS; GROWTH;
D O I
10.7567/APEX.8.111101
中图分类号
O59 [应用物理学];
学科分类号
摘要
The lattice parameters of monoclinic beta-Ga2O3 were determined by powder diffraction in a wide temperature range. The experiments provide a quantitative evaluation of the thermal expansion of the unit cell. It was observed that the expansion of the monoclinic cell is not isotropic. These data are of great technological interest for the deposition of beta-Ga2O3 films on foreign substrates as well as for the deposition of different materials (such as GaN) on Ga2O3 substrates. (C) 2015 The Japan Society of Applied Physics
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页数:3
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