Effect of substrate bias voltage on tensile properties of single crystal silicon microstructure fully coated with plasma CVD diamond-like carbon film

被引：13
作者：
Zhang, Wenlei [1 ]
Hirai, Yoshikazu [1 ]
Tsuchiya, Toshiyuki [1 ]
Tabata, Osamu [1 ]
机构：
[1] Kyoto Univ, Dept Micro Engn, Kyoto 6158540, Japan
来源：
APPLIED SURFACE SCIENCE | 2018年 / 443卷
关键词：
Diamond-like carbon film; Single crystal silicon; Substrate bias voltage; Chemical composition; Tensileproperties; Fracture toughness; FRACTURE-TOUGHNESS; THIN-FILMS; DLC FILMS; MECHANICAL-PROPERTIES; STRENGTH; STRESS; COATINGS; SPECTROSCOPY; RATIOS;
D O I：
10.1016/j.apsusc.2018.02.179
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Tensile strength and strength distribution in a microstructure of single crystal silicon (SCS) were improved significantly by coating the surface with a diamond-like carbon (DLC) film. To explore the influence of coating parameters and the mechanism of film fracture, SCS microstructure surfaces (120 x 4 x 5 mu m(3)) were fully coated by plasma enhanced chemical vapor deposition (PECVD) of a DLC at five different bias voltages. After the depositions, Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), thermal desorption spectrometry (TDS), surface profilometry, atomic force microscope (AFM) measurement, and nanoindentation methods were used to study the chemical and mechanical properties of the deposited DLC films. Tensile test indicated that the average strength of coated samples was 13.2-29.6% higher than that of the SCS sample, and samples fabricated with a 400 V bias voltage were strongest. The fracture toughness of the DLC film was the dominant factor in the observed tensile strength. Deviations in strength were reduced with increasingly negative bias voltage. The effect of residual stress on the tensile properties is discussed in detail. (C) 2018 Elsevier B.V. All rights reserved.
引用
收藏
页码：48 / 54
页数：7
相关论文
共 50 条
[21]   Effect of nitrogen doping on the microstructure and thermal stability of diamond-like carbon coatings containing silicon and oxygen [J].
Peng, Jihua ;
Xiao, Yang ;
Yang, Manzhong ;
Liao, Jiacheng .
SURFACE & COATINGS TECHNOLOGY, 2021, 421
[22]   X-ray reflectivity analysis on initial stage of diamond-like carbon film deposition on Si substrate by RF plasma CVD and on removal of the sub-surface layer by oxygen plasma etching [J].
Harigai, Toru ;
Yasuoka, Yuki ;
Nitta, Noriko ;
Furuta, Hiroshi ;
Hatta, Akimitsu .
DIAMOND AND RELATED MATERIALS, 2013, 38 :36-40
[23]   Influence of duty ratio of pulsed bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition [J].
Nakazawa, Hideki ;
Kamata, Ryosuke ;
Miura, Soushi ;
Okuno, Saori .
THIN SOLID FILMS, 2013, 539 :134-138
[24]   Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD [J].
Ban, M ;
Hasegawa, T ;
Fujii, S ;
Fujioka, J .
DIAMOND AND RELATED MATERIALS, 2003, 12 (01) :47-56
[25]   Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source [J].
Nakazawa, H. ;
Miura, S. ;
Nakamura, K. ;
Nara, Y. .
THIN SOLID FILMS, 2018, 654 :38-48
[26]   The mechanical and tribological properties of polyether ether ketone coated by diamond-like carbon film with plasma-induced transition layer [J].
Cui, Li ;
Guo, Peng ;
Zhou, Xiaohui ;
Zhu, Shaochao ;
Ke, Peiling ;
Wang, Aiying .
DIAMOND AND RELATED MATERIALS, 2024, 147
[27]   Effect of deposition temperature on growth, structure and mechanical properties of diamond-like carbon films co-doped by titanium and silicon [J].
Jiang Jin-Long ;
Huang Hao ;
Wang Qiong ;
Wang Shan-Min ;
Wei Zhi-Qiang ;
Yang Hua ;
Hao Jun-Ying .
ACTA PHYSICA SINICA, 2014, 63 (02)
[28]   Fracture behavior of single-crystal silicon microstructure coated with stepwise bias-graded a-C:H film [J].
Xia, Yuanlin ;
Hirai, Yoshikazu ;
Tsuchiya, Toshiyuki .
SURFACE & COATINGS TECHNOLOGY, 2021, 405
[29]   Hydrogen Effects on the Properties of Silicon/Nitrogen-Coincorporated Diamond-Like Carbon Films Prepared by Plasma-Enhanced Chemical Vapor Deposition [J].
Nakazawa, Hideki ;
Okuno, Saori ;
Miura, Soushi ;
Kamata, Ryosuke .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (07)
[30]   Fabrication and characterization of optical, mechanical and chemical properties of diamond-like carbon thin film deposited on polymer substrate [J].
Eshaghi, Akbar ;
Salehi, Mozhgan .
OPTICAL AND QUANTUM ELECTRONICS, 2018, 50 (12)
12345