Design and Analysis of Flexure Hinge in the Double Crystal Monochromator

被引:0
|
作者
Zhao, Xiangguo [1 ]
Zhou, Sizhong [1 ]
Jiang, Bo [1 ]
Jiang, Kai [1 ]
Mei, Chao [1 ]
机构
[1] Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian 710119, Peoples R China
来源
VIBRATION, STRUCTURAL ENGINEERING AND MEASUREMENT II, PTS 1-3 | 2012年 / 226-228卷
关键词
Cosine flexure hinge; Double crystal monochromator; Precision engineering measurement; Finite element;
D O I
10.4028/www.scientific.net/AMM.226-228.2175
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper analyzes the relationship between the parameters of CFH (Cosine Flexure Hinge) and the adjustable angle in the measurement and micro-adjustment of yaw, pitch and roll angle in the DCM (Double Crystal Monochromator). We derive the motion equations of CFH during the measurement and adjustment process, and get accurate expression formulas. Then we use ANSYS software to simulate the CFH and compare the simulation value and the theoretical value. It shows that the maximum angular deflection error is less than 3.5 percent. We compare the CFH to the RCFH (Right Circular Flexure Hinge); and get that the maximum angular deflection theta(y) and the linear displacements of RCFH are all about 1.56 times than the CFH when the parameters are equivalent. Therefore, we provide a simple flexure hinge to improve the stability and accuracy of angular measurement and micro- adjustment in the DCM.
引用
收藏
页码:2175 / 2180
页数:6
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