Elemental analysis of coatings by high-frequency glow discharge optical emission spectroscopy

被引：38

作者：

Kiryukhantsev-Korneev, Ph. V. ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISIS Natl Univ Sci & Tec, Leninsky Pr 4, Moscow 119049, Russia

来源：

PROTECTION OF METALS AND PHYSICAL CHEMISTRY OF SURFACES | 2012年 / 48卷 / 05期

关键词：

FILMS;

D O I：

10.1134/S207020511205005X

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

The physical basics of glow discharge optical emission spectroscopy are considered. The scheme of the system used for chemical analysis of coatings by glow discharge optical emission spectroscopy is described by the example of a Profiler 2 instrument (Horiba Jobin Yvon). Various types of coatings and methods for surface treatment are compared. On the basis of these studies, it is established that, under the basic measuring regimes without fine adjustment of sputtering parameters, the maximum analyzed depth of coatings is around 80 mu m and the depth resolution is 10-20 nm. Almost any combinations of substrate and coating materials, including ceramics, glasses, and polymers, can be analyzed.

引用

页码：585 / 590

页数：6

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