Radio frequency plasma nitriding of aluminium at higher power levels

被引：13
作者：
Gredelj, Sabina
Kumar, Sunil
Gerson, Andrea R.
Cavallaro, Giuseppe P.
机构：
[1] CSIRO Mfg & Infrastruct Technol, Woodville, SA 5011, Australia
[2] Univ S Australia, Ian Wark Res Inst, ARC Special Res Ctr Particle & Mat Interfaces, Mawson Lakes, SA 5095, Australia
[3] Univ S Australia, Appl Ctr Struct & Synchrotron Studies, Mawson Lakes, SA 5095, Australia
来源：
THIN SOLID FILMS | 2006年 / 515卷 / 04期
关键词：
plasma nitriding; aluminium alloys; aluminium nitride; XPS; SEM; SURFACES;
D O I：
10.1016/j.tsf.2006.04.031
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nitriding of aluminium 2011 using a radio frequency plasma at higher power levels (500 and 700 W) and lower substrate temperature (500 degrees C) resulted in higher AlN/Al2O3 ratios than obtained at 100 Wand 575 degrees C. AlN/Al2O3 ratios derived from X-ray photoelectron spectroscopic analysis (and corroborated by heavy ion elastic recoil time of flight spectrometry) for treatments preformed at 100 (575 degrees C), 500 (500 degrees C) and 700 W (500 degrees C) were 1.0, 1.5 and 3.3, respectively. Scanning electron microscopy revealed that plasma nitrided surfaces obtained at higher power levels exhibited much finer nodular morphology than obtained at 100 W. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：1480 / 1485
页数：6
相关论文
共 15 条
[1]  
ADJAOTTOR AA, 1996, SURFACE MODIFICATION, V9, P421
[2]   Plasma immersion ion implantation of pure aluminium at elevated temperatures [J].
Blawert, C ;
Mordike, BL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 :873-878
[3]   PLASMA NITRIDING OF AL-99.5 [J].
CHEN, HY ;
STOCK, HR ;
MAYR, P .
JOURNAL DE PHYSIQUE IV, 1993, 3 (C7) :971-979
[4]  
DAVIS JR, 1994, ASM HDB SURFACE ENG, V5, P759
[5]   Formation of aluminum nitride on aluminum surfaces by ECR nitrogen plasmas [J].
Ebisawa, T ;
Saikudo, R .
SURFACE & COATINGS TECHNOLOGY, 1996, 86-7 (1-3) :622-627
[6]  
Goldston R.J., 1995, Introduction to Plasma Physics
[7]   Plasma nitriding and in situ characterisation of aluminium [J].
Gredelj, S ;
Gerson, AR ;
Kumar, S ;
McIntyre, NS .
APPLIED SURFACE SCIENCE, 2002, 199 (1-4) :234-247
[8]   Inductively coupled plasma nitriding of aluminium [J].
Gredelj, S ;
Gerson, AR ;
Kumar, S ;
Cavallaro, GP .
APPLIED SURFACE SCIENCE, 2002, 199 (1-4) :183-194
[9]   Characterization of aluminium surfaces with and without plasma nitriding by X-ray photoelectron spectroscopy [J].
Gredelj, S ;
Gerson, AR ;
Kumar, S ;
Cavallaro, GP .
APPLIED SURFACE SCIENCE, 2001, 174 (3-4) :240-250
[10]  
*INT CTR DIFFR DAT, ICDD POWD DIFFR DAT
12