MEMS Composite Porous Silicon/Polysilicon Cantilever Sensor for Enhanced Triglycerides Biosensing

被引：22

作者：

Fernandez, Renny Edwin ^{[1
]}

Stolyarova, Sara ^{[4
,5
]}

Chadha, Anju ^{[2
,3
]}

Bhattacharya, Enakshi ^{[1
]}

Nemirovsky, Yael ^{[4
,5
]}

机构：

[1] Indian Inst Technol, Dept Elect Engn, Madras 600036, Tamil Nadu, India

[2] Indian Inst Technol, Dept Biotechnol, Madras 600036, Tamil Nadu, India

[3] Indian Inst Technol, Natl Ctr Catalysis Res, Madras 600036, Tamil Nadu, India

[4] Technion Israel Inst Technol, Inst Solid State, IL-32000 Haifa, Israel

[5] Technion Israel Inst Technol, Dept Elect Engn, IL-32000 Haifa, Israel

来源：

IEEE SENSORS JOURNAL | 2009年 / 9卷 / 12期

关键词：

Microcantilevers; polysilicon; porous silicon; trygliceride sensor; SILICON; NUCLEATION; MODEL;

D O I：

10.1109/JSEN.2009.2030643

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel composite porous silicon/ polysilicon microcantilever for biosensing applications with enhanced sensitivity is reported. It is fabricated by surface micromachining of polysilicon cantilevers followed by the formation of the surface porous layer after release by Reaction Induced Vapor Phase Stain Etch. The microcantilevers with porous surface layer are characterized by their morphology that exhibits a dual macro and nanostructure for very effective immobilization of biomolecules. The current work focuses on the fabrication of composite porous silicon/polysilicon microcantilevers, characterization of their morphology and resonance frequency, as well as demonstration of improved immobilization of enzyme resulting in enhanced sensing of triglycerides.

引用

页码：1660 / 1666

页数：7

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