Oxygen Concentration Dependence of the Optical and Electrical Properties of Mn-Doped Tin Oxide Thin Films Deposited on a Polyethylene Terephthalate Substrate
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作者:
Cho, Young-Soo
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Chungbuk Natl Univ, Dept Mat Engn, Cheongju 28644, South KoreaChungbuk Natl Univ, Dept Mat Engn, Cheongju 28644, South Korea
Cho, Young-Soo
[1
]
Jang, Gun-Eik
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Chungbuk Natl Univ, Dept Mat Engn, Cheongju 28644, South KoreaChungbuk Natl Univ, Dept Mat Engn, Cheongju 28644, South Korea
Jang, Gun-Eik
[1
]
机构:
[1] Chungbuk Natl Univ, Dept Mat Engn, Cheongju 28644, South Korea
SnO2;
Mn (2.59 wt.%)-Doped Tin Oxide;
Transparent Electrode;
Transmittance;
O-2/(Ar+O-2) Ratio;
Band Gap;
MAGNETIC-PROPERTIES;
SNO2;
MORPHOLOGY;
D O I:
10.1166/jnn.2020.17254
中图分类号:
O6 [化学];
学科分类号:
0703 ;
摘要:
Mn (2.59 wt.%)-doped tin oxide (MTO) was deposited on a polyethylene terephthalate (PET) substrate using RF magnetron sputtering at room temperature. Oxygen was introduced during the sputtering process to prevent the reduction of transmittance and the formation of nonstoichiometric compositions. The dependence of the optical and electrical properties of MTO thin films on the O-2/(Ar+O-2) ratio was systematically investigated. The transmittance of the MTO single layer (24 nm) at 550 nm gradually increased from 85.9% to 88.2% with an increase of the O-2/(Ar+O-2) ratio from 0% to 7.9%. The optical band gap was also affected by the O-2/(Ar+O-2) ratio, varying from 3.30 to 3.64 eV. The MTO film deposited at an O-2/(Ar+O-2) ratio of 2.7% showed the minimum resistivity (0.03 Omega . cm). The XPS spectra indicated that the SnO2 thin films become almost stoichiometric as the O-2/(Ar+O-2) ratio increased. Thus, this sputtering process can be used to prepare flexible MTO films with a wider optical band gap, improved transmittance, and decreased resistivity.
机构:
Taif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi ArabiaTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Alhuthali, A.
El-Nahass, M. M.
论文数: 0引用数: 0
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机构:
Ain Shams Univ, Dept Phys, Fac Educ, Cairo 11757, EgyptTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
El-Nahass, M. M.
Atta, A. A.
论文数: 0引用数: 0
h-index: 0
机构:
Taif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Ain Shams Univ, Dept Phys, Fac Educ, Cairo 11757, EgyptTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Atta, A. A.
Abd El-Raheem, M. M.
论文数: 0引用数: 0
h-index: 0
机构:
Taif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Sohag Univ, Dept Phys, Fac Sci, Sohag 82524, EgyptTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Abd El-Raheem, M. M.
Elsabawy, Khaled M.
论文数: 0引用数: 0
h-index: 0
机构:
Tanta Univ, Dept Chem, Mat Sci Unit, Fac Sci, Tanta 31725, Egypt
Taif Univ, Dept Chem, Fac Sci, At Taif 21974, Saudi ArabiaTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Elsabawy, Khaled M.
Hassanien, A. M.
论文数: 0引用数: 0
h-index: 0
机构:
Shaqra Univ, Fac Sci & Humanity Studies Al Quwayiyah, Dept Phys, Al Quwayiyah 11971, Saudi ArabiaTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Jang, Jiuk
Hyun, Byung Gwan
论文数: 0引用数: 0
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Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Hyun, Byung Gwan
Ji, Sangyoon
论文数: 0引用数: 0
h-index: 0
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Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Ji, Sangyoon
Cho, Eunjin
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Cho, Eunjin
An, Byeong Wan
论文数: 0引用数: 0
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机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
An, Byeong Wan
Cheong, Woon Hyung
论文数: 0引用数: 0
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Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Cheong, Woon Hyung
Park, Jang-Ung
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Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
机构:
Korea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South KoreaKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Lee, Jin Ju
Ha, Jong-Yoon
论文数: 0引用数: 0
h-index: 0
机构:
Univ Maryland, Inst Res Elect & Appl Phys, College Pk, MD 20742 USAKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Ha, Jong-Yoon
Choi, Won-Kook
论文数: 0引用数: 0
h-index: 0
机构:
Korea Inst Sci & Technol, Interface Control Res Ctr, Seoul 136791, South KoreaKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Choi, Won-Kook
Cho, Yong Soo
论文数: 0引用数: 0
h-index: 0
机构:
Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South KoreaKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
Lekshmy, Sivashankaran Nair Sujatha
Anitha, Vijayam Sukumaran Nair
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机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
Anitha, Vijayam Sukumaran Nair
Thomas, PuthenKadathil Vargehese
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机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
Thomas, PuthenKadathil Vargehese
Joy, Kunjkunju
论文数: 0引用数: 0
h-index: 0
机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
机构:
Taif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi ArabiaTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Alhuthali, A.
El-Nahass, M. M.
论文数: 0引用数: 0
h-index: 0
机构:
Ain Shams Univ, Dept Phys, Fac Educ, Cairo 11757, EgyptTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
El-Nahass, M. M.
Atta, A. A.
论文数: 0引用数: 0
h-index: 0
机构:
Taif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Ain Shams Univ, Dept Phys, Fac Educ, Cairo 11757, EgyptTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Atta, A. A.
Abd El-Raheem, M. M.
论文数: 0引用数: 0
h-index: 0
机构:
Taif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Sohag Univ, Dept Phys, Fac Sci, Sohag 82524, EgyptTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Abd El-Raheem, M. M.
Elsabawy, Khaled M.
论文数: 0引用数: 0
h-index: 0
机构:
Tanta Univ, Dept Chem, Mat Sci Unit, Fac Sci, Tanta 31725, Egypt
Taif Univ, Dept Chem, Fac Sci, At Taif 21974, Saudi ArabiaTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
Elsabawy, Khaled M.
Hassanien, A. M.
论文数: 0引用数: 0
h-index: 0
机构:
Shaqra Univ, Fac Sci & Humanity Studies Al Quwayiyah, Dept Phys, Al Quwayiyah 11971, Saudi ArabiaTaif Univ, Dept Phys, Fac Sci, At Taif 21974, Saudi Arabia
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Jang, Jiuk
Hyun, Byung Gwan
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Hyun, Byung Gwan
Ji, Sangyoon
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Ji, Sangyoon
Cho, Eunjin
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Cho, Eunjin
An, Byeong Wan
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
An, Byeong Wan
Cheong, Woon Hyung
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
Cheong, Woon Hyung
Park, Jang-Ung
论文数: 0引用数: 0
h-index: 0
机构:
Ulsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South KoreaUlsan Natl Inst Sci & Technol, Wearable Elect Res Grp, Sch Mat Sci & Engn, Ulsan Metropolitan City 44919, South Korea
机构:
Korea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South KoreaKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Lee, Jin Ju
Ha, Jong-Yoon
论文数: 0引用数: 0
h-index: 0
机构:
Univ Maryland, Inst Res Elect & Appl Phys, College Pk, MD 20742 USAKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Ha, Jong-Yoon
Choi, Won-Kook
论文数: 0引用数: 0
h-index: 0
机构:
Korea Inst Sci & Technol, Interface Control Res Ctr, Seoul 136791, South KoreaKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
Choi, Won-Kook
Cho, Yong Soo
论文数: 0引用数: 0
h-index: 0
机构:
Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South KoreaKorea Inst Sci & Technol, Elect Mat Res Ctr, Seoul 136791, South Korea
机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
Lekshmy, Sivashankaran Nair Sujatha
Anitha, Vijayam Sukumaran Nair
论文数: 0引用数: 0
h-index: 0
机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
Anitha, Vijayam Sukumaran Nair
Thomas, PuthenKadathil Vargehese
论文数: 0引用数: 0
h-index: 0
机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India
Thomas, PuthenKadathil Vargehese
Joy, Kunjkunju
论文数: 0引用数: 0
h-index: 0
机构:
Mar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, IndiaMar Ivanios Coll, Post Grad & Res Dept Phys, Thin Film Lab, Thiruvananthapuram 695015, Kerala, India