Surface finish of micro punch with ion beam irradiation

被引：13

作者：

Xu Jie ^{[1
,2
]}

Wang Chun-ju ^{[1
,2
]}

Guo Bin ^{[1
,2
]}

Shan De-bin ^{[1
,2
]}

Sugiyama, Y. ^{[3
]}

Ono, S. ^{[3
]}

机构：

[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China

[2] Harbin Inst Technol, Key Lab Microsyst & Microstruct Mfg, Minist Educ, Harbin 150080, Peoples R China

[3] Elionix Inc, Tokyo 1920063, Japan

来源：

TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA | 2009年 / 19卷

基金：

中国国家自然科学基金;

关键词：

surface finish; ion beam; micro punch; surface roughness; FABRICATION;

D O I：

10.1016/S1003-6326(10)60102-1

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

Ion beam irradiation was adopted for surface treatment of the micro punch manufactured by precision machining. Ar plasma was used for the ion irradiation process, which was generated by the electron cyclotron resonance(ECR) equipment. The surface finish processes of micro punch were carried out at irradiation angles of 45 degrees and 10 degrees, respectively. The surface roughness and topography were measured to estimate the quality of surface finish. The results show that the ion irradiation is very effective to reduce the surface roughness, which can be improved more significantly at irradiation angle of 10 degrees than at 45 degrees. The technology of surface finish with ion beam irradiation is suitable for the surface treatment of micro die.

引用

页码：S526 / S530

页数：5

共 15 条

[1] Tribology in microforming [J].