Statistical self-calibrating algorithm for three-sample phase-shift interferometry

被引:11
作者
Dobroiu, A
Logofatu, PC
Apostol, D
Damian, V
机构
[1] Institute of Atomic Physics, Lasers Department, Bucharest
关键词
D O I
10.1088/0957-0233/8/7/008
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A new self-calibrating algorithm is described that succeeds in reconstructing an almost error-free wavefront from only three interferograms. The algorithm is based on the assumption that the optical phase, taken module 2 pi, is quasi-uniformly distributed in the range [0,2 pi) over the field of the interferograms. When the actual reference phases differ from those considered in the phase computation program a non-uniform histogram of the computed phase results. An analysis of this histogram allows a fitting procedure to find the actual phase shifts. Eventually an accurate shape of the wavefront can be calculated or a corrected signal can be sent to the phase-shifting device.
引用
收藏
页码:738 / 745
页数:8
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