An optomechanical pressure sensor using multimode interference couplers

被引：5

作者：

Hah, D ^{[1
]}

Yoon, E ^{[1
]}

Hong, S ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305338, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 4B期

关键词：

optomechanical pressure sensor; multimode interference couplers; p(+)-Si membrane; strip-loaded silica waveguide; photoelastic effect;

D O I：

10.1143/JJAP.38.2664

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new optomechanical pressure sensor using multimode interference (MMI) couplers and a thin p(+)-Si membrane is presented. We simulate the device characteristics by the normal mode theory considering deflection and strain of the membrane. The optical waveguide is made of a single-mode, strip-loaded SiO2-SiNx-SiO2 system. Device size can be reduced to 0.5 x 13 mm(2) by using a MMI coupler, and the total thickness of the membrane is 5.9 mu m. The measured sensitivity is 11.98 ppm/Pa in a range of 50 kPa, which is larger than that of conventional capacitive sensors.

引用

页码：2664 / 2668

页数：5

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