CAPACITIVE SENSING ELECTRODES WITH REDUCED SQUEEZE-FILM DAMPING

被引：0

作者：

Sorger, Alexander ^{[1
]}

Classen, Johannes ^{[2
]}

Mehner, Jan ^{[1
]}

机构：

[1] Tech Univ Chemnitz, Chemnitz, Germany

[2] Robert Bosch GmbH, Reutlingen, Germany

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

关键词：

MEMS inertial sensors; capacitive sensing electrodes; squeeze-film damping; dual layer surface micromachining process;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on a new design of closing-gap capacitive electrodes with reduced squeeze-film damping. In contrast to state of the art electrodes our electrode design incorporates small venting slits and therefore allows to significantly reduce the damping contribution of sense electrodes in MEMS inertial sensors with only minor reduction of electrical sensitivity. Our approach is realized by means of an advanced surface micromachining process featuring an additional polysilicon layer and suitable for mass production. We present a comprehensive proof of concept by means of CFD and electric field simulations as well as SEM images and measurement data obtained from fabricated test devices.

引用

页码：1033 / 1036

页数：4

共 9 条

[1]

Classen J., 2017, IEEE MEMS

[2] Squeeze-film damper design with air channels: experimental verification [J].