Measurement of thicknesses and refractive indices by low-coherence confocal interferometric microscope

被引：0

作者：

Yamaguchi, I ^{[1
]}

Fukano, T ^{[1
]}

机构：

[1] RIKEN, Inst Phys & Chem Res, Opt Engn Lab, Wako, Saitama 3510198, Japan

来源：

SELECTED PAPER FROM INTERNATIONAL CONFERENCE ON OPTICS AND OPTOELECTRONICS '98: SILVER JUBILEE SYMPOSIUM OF THE OPTICAL SOCIETY OF INDIA | 1999年 / 3729卷

关键词：

D O I：

10.1117/12.346811

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

ill this paper we first survey non-contacting measurement of thickness and refractive index of transparent plates and films. Especially, the separation of these two quantities are focused on. Then we explain the principle and the apparatus for separate measurement of refractive index and geometrical thickness, which are also applicable to multiple layers. In addition, several application examples of this method are also presented.

引用

页码：371 / 383

页数：13

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