Effect Crossed Electric and Magnetic Fields of a Glow Discharge

被引：0

作者：

Vafin, R. ^{[1
]}

Yagafarov, I. ^{[1
]}

Khusainov, Y. ^{[1
]}

Pesin, A. ^{[2
]}

Pustovoytov, D. ^{[2
]}

机构：

[1] Ufa State Aviat Tech Univ, Ufa 450000, Russia

[2] Nosov Magnitogorsk State Tech Univ, Magnitogorsk 455000, Russia

来源：

INTERNATIONAL CONFERENCE - THE PHYSICS OF LOW TEMPERATURE PLASMA (PLTP-2017) | 2017年 / 927卷

基金：

俄罗斯科学基金会;

关键词：

D O I：

10.1088/1742-6596/927/1/012071

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A new method of processing in a glow discharge plasma in crossed electric and magnetic fields is investigated. This method makes it possible to intensify the process of diffusion saturation of the surface with nitrogen. Volt-ampere characteristics of a glow discharge in crossed electric and magnetic fields are obtained. The effect of ion nitriding in crossed electric and magnetic fields on the hardness and structural-phase composition of tool steels R6M5 and Kh12 is studied.

引用

页数：5

共 7 条

[1] Recent advances in magnetron sputtering [J].