Rugate filter made with composite thin films by ion-beam sputtering

被引：41

作者：

Lee, CC ^{[1
]}

Tang, CJ

Wu, JY

机构：

[1] Natl Cent Univ, Thin Film Technol Ctr, Chungli 32001, Taiwan

[2] Natl Cent Univ, Inst Opt Sci, Chungli 32001, Taiwan

来源：

APPLIED OPTICS | 2006年 / 45卷 / 07期

关键词：

D O I：

10.1364/AO.45.001333

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Composite films of Ta-Si oxide with refractive indices that varied from 1.48 to 2.15 were realized by using rf ion-beam sputtering. All the composite films were amorphous and had a surface roughness of less than 0.3 nm. The inhomogeneity of the composite was discussed, and a rugate filter was designed and fabricated by automatic computer control. (c) 2006 Optical Society of America.

引用

页码：1333 / 1337

页数：5

共 22 条

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