The jet flow characteristic was analyzed by the finite element method in a turning cavity. Using ANSYS-FLOTRAN CFD software, according to the actual size, building an entity model, the finite element simulation was conducted by a series of procedures, such as meshing, applying loads and solve. Then the flow field distribution was calculated with the different input angular rate. The results are as follow: (1) In static status, airflow velocity shows a symmetry distribution through the cavity central axis. The maximum velocity of gas flow appears near the cavity central axis. The airflow velocity gradually decreases on the both sides of the cavity central axis. and the velocity is zero near the wall. (2) In turning status, by the action of the Coriolis force, the centre of jet flow will be deflected. The flow field shows an asymmetry distribution through the cavity central axis. The flow velocity will change with angular rate for the each point. So the piezoelectric fluidic angular rate sensor uses this characteristic sensitized the angular rate.
