InAs/GaAs quantum dots on GaAs-on-V-grooved-Si substrate with high optical quality in the 1.3 μm band

被引:36
作者
Wan, Yating [1 ]
Li, Qiang [1 ]
Geng, Yu [1 ]
Shi, Bei [1 ]
Lau, Kei May [1 ]
机构
[1] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Kowloon, Hong Kong, Peoples R China
关键词
TEMPERATURE-DEPENDENCE;
D O I
10.1063/1.4929441
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report self-assembled InAs/GaAs quantum dots (QDs) grown on a specially engineered GaAs-on-V-grooved-Si substrate by metal-organic vapor phase epitaxy. Recessed pockets formed on V-groove patterned Si (001) substrates were used to prevent most of the hetero-interfacial stacking faults from extending into the upper QD active region. 1.3 mu m room temperature emission from high-density (5.6 x 10(10) cm(-2)) QDs has been obtained, with a narrow full-width-at-half-maximum of 29 meV. Optical quality of the QDs was found to be better than those grown on conventional planar offcut Si templates, as indicated by temperature-dependent photoluminescence analysis. Results suggest great potential to integrate QD lasers on a Si complementary-metal-oxide-semiconductor compatible platform using such GaAs on Si templates. (C) 2015 AIP Publishing LLC.
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页数:4
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