Progress in Laboratory Based X-ray Microscopy

被引：0
|
作者：
Ebensperger, Thomas [1 ,2 ]
Nachtrab, Frank [2 ,3 ]
Sukowski, Frank [2 ]
Hanke, Randolf [1 ,2 ,3 ]
机构：
[1] Univ Wurzburg, Lehrstuhl Rontgenmikroskopie, D-97070 Wurzburg, Germany
[2] Fraunhofer Inst Integrierte Schaltungen, Entwicklungszentrum Rontgentechn EZRT, Erlangen, Germany
[3] Univ Erlangen Nurnberg, Exzellenzcluster Engn Adv Mat, Erlangen, Germany
来源：
2011 24TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC) | 2011年
关键词：
X-ray microscopy; X-ray source charakterization; transmission target optimization; Monte Carlo simulation; nano radiography;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In recent years X-ray tomography has made progressive steps towards spatial resolution in the sub-micron range. A limiting factor is the finite focal spot size of state-of-the-art microfocus tubes. In this contribution we present a radiography setup with an X-ray source capable of generation focal spot sizes down to 80 nm, thanks to special targets designed using Monte Carlo simulations. Together with a high geometric magnification and a low-noise photon-counting detector this makes the setup ideal for material characterisation at the nanoscale.
引用
收藏
页码：13 / +
页数：2
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