Electrical contact fabrication on vertically aligned ZnO nanowires investigated by current sensing AFM

被引：3

作者：

Jain, Vaibhav ^{[1
]}

Kushto, Gary P. ^{[1
]}

Wolak, Mason ^{[1
]}

Maekinen, Antti J. ^{[1
]}

机构：

[1] Naval Res Lab, Opt Sci Div, Washington, DC 20375 USA

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2013年 / 210卷 / 10期

关键词：

atomic force microscopy; I-V characteristics; metal-semiconductor contacts; nanowires; Ohmic contacts; ZnO; SCHOTTKY CONTACTS; NANORODS;

D O I：

10.1002/pssa.201228813

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present a simple method for generating vertically aligned (VA) ZnO nanowire (NW) arrays with tailored electrical top contacts, suitable for photodetector and photovoltaic applications. ZnO NWs were synthesized on Si substrate in house using a hydro-thermal method, producing dense and highly organized vertical ZnO NW (approximate to 50-100nm) arrays. The vertical geometry of the NW arrays facilitated further processing of the NW structures and streamlined in situ characterization of individual NWs as well as entire NW ensembles. The top contact metallization involved depositing a thin film of low work function metals such as aluminum (5nm) followed by a thin film of gold (15nm) onto NW arrays, partially embedded in an insulating silsesquioxane-based material (SOG-400F). The I-V characteristics of individual ZnO NWs were measured using current sensing atomic force microscopy (CS-AFM). Compared with arrays of as-grown ZnO NWs, the metalized top contacts of NWs resulted in improved I-V characteristics with good Ohmic behavior at the metal-semiconductor contact (MSC).

引用

页码：2153 / 2158

页数：6

共 24 条

[1] ZnO based advanced functional nanostructures: synthesis, properties and applications [J].

Ahmad, Mashkoor ;

Zhu, Jing .

JOURNAL OF MATERIALS CHEMISTRY, 2011, 21 (03) :599-614

[2] Electrical properties of ZnO nanorods studied by conductive atomic force microscopy [J].

Beinik, I. ;

Kratzer, M. ;

Wachauer, A. ;

Wang, L. ;

Lechner, R. T. ;

Teichert, C. ;

Motz, C. ;

Anwand, W. ;

Brauer, G. ;

Chen, X. Y. ;

Hsu, X. Y. ;

Djurisic, A. B. .

JOURNAL OF APPLIED PHYSICS, 2011, 110 (05)

[3] Characterization of nanowires with the low energy electron point source (LEEPS) microscope [J].

Beyer, Andre ;

Weber, Dirk H. ;

Voelkel, Berthold ;

Goelzhaeuser, Armin .

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2010, 247 (10) :2550-2556

[4] Characterization of ZnO nanostructures: A challenge to positron annihilation spectroscopy and other methods [J].

Brauer, Gerhard ;

Anwand, Wolfgang ;

Grambole, Dieter ;

Egger, Werner ;

Sperr, Peter ;

Beinik, Igor ;

Wang, Lin ;

Teichert, Christian ;

Kuriplach, Jan ;

Lang, Jan ;

Zviagins, Sergei ;

Cizmar, Erik ;

Ling, Chi Chung ;

Hsu, Yuk Fan ;

Xi, Yan Yan ;

Chen, Xinyi ;

Djurisic, Aleksandra B. ;

Skorupa, Wolfgang .

PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 6, NO 11, 2009, 6 (11) :2556-+

[5] Direct Measurements of Lateral Variations of Schottky Barrier Height Across "End-On" Metal Contacts to Vertical Si Nanowires by Ballistic Electron Emission Microscopy [J].

Cai, Wei ;

Che, Yulu ;

Pelz, Jonathan P. ;

Hemesath, Eric R. ;

Lauhon, Lincoln J. .

NANO LETTERS, 2012, 12 (02) :694-698

[6] Indium phosphide nanowires as building blocks for nanoscale electronic and optoelectronic devices [J].

Duan, XF ;

Huang, Y ;

Cui, Y ;

Wang, JF ;

Lieber, CM .

NATURE, 2001, 409 (6816) :66-69

[7] Electrical properties of ZnO nanowire-field effect transistors characterized with scanning probes [J].

Fan, ZY ;

Lu, JG .

APPLIED PHYSICS LETTERS, 2005, 86 (03) :1-3

[8] Electrical and photoelectrical performances of nano-photodiode based on ZnO nanowires [J].

He, Jr Hau ;

Ho, Shu Te ;

Wu, Tai Bor ;

Chen, Lih Juann ;

Wang, Zhong Lin .

CHEMICAL PHYSICS LETTERS, 2007, 435 (1-3) :119-122

[9] Control of thickness and orientation of solution-grown silicon nanowires [J].

Holmes, JD ;

Johnston, KP ;

Doty, RC ;

Korgel, BA .

SCIENCE, 2000, 287 (5457) :1471-1473

[10] Chemistry and physics in one dimension: Synthesis and properties of nanowires and nanotubes [J].

Hu, JT ;

Odom, TW ;

Lieber, CM .

ACCOUNTS OF CHEMICAL RESEARCH, 1999, 32 (05) :435-445

← 1 2 3 →