Integrated micro ring resonator displacement sensor for scanning probe microscopies

被引：37

作者：

Kiyat, I ^{[1
]}

Kocabas, C ^{[1
]}

Aydinli, A ^{[1
]}

机构：

[1] Bilkent Univ, Dept Phys, TR-06800 Ankara, Turkey

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2004年 / 14卷 / 03期

关键词：

D O I：

10.1088/0960-1317/14/3/009

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe a novel displacement sensor for scanning probe microscopies using an integrated optical micro ring resonator. This device operates by means of monitoring the changes in the transmission spectrum of a high finesse micro ring resonator. Finite element method simulations were carried out to obtain the optimum sensor design and finite difference time domain simulation was used to obtain the transfer characteristics of micro ring resonators. Operation principles and sensitivity calculations are discussed in detail. To achieve high sensitivity, we have studied different types of ring resonator. The highest sensitivity is obtained in a race-track resonator. This new design should provide sensitivities as high as similar to 10(-4) Angstrom(-1).

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页码：374 / 381

页数：8

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