Optical Phased Array Using High-Contrast Grating All-Pass Filters for Fast Beam Steering

被引：2
|
作者：
Yang, Weijian [1 ]
Sun, Tianbo [1 ]
Rao, Yi [1 ]
Chan, Trevor
Megens, Mischa
Yoo, Byung-Wook [1 ]
Horsley, David A.
Wu, Ming C. [1 ]
Chang-Hasnain, Connie J. [1 ]
机构：
[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
来源：
HIGH CONTRAST METASTRUCTURES II | 2013年 / 8633卷
关键词：
Beam steering; optical phased arrays; micro-electro-mechanical structures; gratings; subwavelength; high contrast gratings; high contrast metamaterials; LASER;
D O I：
10.1117/12.2004756
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A novel 8x8 optical phased array based on high-contrast grating (HCG) all-pass filters (APFs) is experimentally demonstrated with high speed beam steering. Highly efficient phase tuning is achieved by micro-electro-mechanical actuation of the HCG to tune the cavity length of the APFs. Using APF phase-shifters allows a large phase shift with an actuation range of only tens of nanometers. The ultrathin HCG further ensures a high tuning speed (0.626 MHz). Both one-dimensional and two-dimensional HCGs are demonstrated as the actuation mirrors of the APF arrays with high beam steering performance.
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页数：5
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