Silicon nanowire based Pirani sensor for vacuum measurements

被引:28
|
作者
Brun, T. [1 ]
Mercier, D. [1 ]
Koumela, A. [1 ]
Marcoux, C. [1 ]
Duraffourg, L. [1 ]
机构
[1] CEA, LETI, F-38054 Grenoble, France
关键词
PRESSURE SENSOR;
D O I
10.1063/1.4765665
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 x 260 nm(2) rectangular section and a 5.2 mu m length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power consumption. The nano-Pirani constructed are capable of measuring pressures from 50 to 10(5) Pa. Moreover, their fabrication is compatible with microelectronic and micromachining fabrication techniques making them suitable for in-situ monitoring of micro and nano systems vacuum packaging. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4765665]
引用
收藏
页数:4
相关论文
共 50 条
  • [1] A MEMS Pirani Vacuum Gauge Based on Porous Silicon
    Lin, Yuzhe
    Zhang, Zichao
    Tao, Jifang
    Wen, Lianggong
    MICROMACHINES, 2025, 16 (03)
  • [2] A high thermal resistance MEMS-based Pirani vacuum sensor chip
    Dams, Florian
    Schreiner, Rupert
    SMART SENSORS, ACTUATORS, AND MEMS VI, 2013, 8763
  • [3] Characterization of a SAW-Pirani vacuum sensor for two different operating modes
    Mercier, D.
    Bordel, G.
    Brunet-Manquat, P.
    Verrun, S.
    Elmazria, O.
    Sarry, F.
    Belgacem, B.
    Bounoua, J.
    SENSORS AND ACTUATORS A-PHYSICAL, 2012, 188 : 41 - 47
  • [4] Nanoporous Pirani sensor based on anodic aluminum oxide
    Jeon, Gwang-Jae
    Kim, Woo Young
    Shim, Hyun Bin
    Lee, Hee Chul
    APPLIED PHYSICS LETTERS, 2016, 109 (12)
  • [5] Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging
    Topalli, Ebru Sagiroglu
    Topalli, Kagan
    Alper, Said Emre
    Serin, Tulay
    Akin, Tayfun
    IEEE SENSORS JOURNAL, 2009, 9 (03) : 263 - 270
  • [6] Tungsten-Microhotplate-Array-Based Pirani Vacuum Sensor System With On-Chip Digital Front-End Processor
    Wang, Jiaqi
    Tang, Zhenan
    Li, Jinfeng
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (04) : 834 - 841
  • [7] A micro-Pirani vacuum gauge based on micro-hotplate technology
    Zhang, FT
    Tang, Z
    Yu, J
    Jin, RC
    SENSORS AND ACTUATORS A-PHYSICAL, 2006, 126 (02) : 300 - 305
  • [8] A SOI Pirani sensor with triple heat sinks
    Li, Q.
    Goosen, J. F. L.
    van Beek, J. T. M.
    van Keulen, F.
    SENSORS AND ACTUATORS A-PHYSICAL, 2010, 162 (02) : 267 - 271
  • [9] A CMOS compatible micro-Pirani vacuum sensor based on mutual heat transfer with 5-decade operating range and 0.3 Pa detection limit
    Piotto, Massimo
    Del Cesta, Simone
    Bruschi, Paolo
    SENSORS AND ACTUATORS A-PHYSICAL, 2017, 263 : 718 - 726
  • [10] Pirani pressure sensor for smart wafer-level packaging
    Mailly, F.
    Dumas, N.
    Pous, N.
    Latorre, L.
    Garel, O.
    Martincic, E.
    Verjus, F.
    Pellet, C.
    Dufour-Gergam, E.
    Nouet, P.
    SENSORS AND ACTUATORS A-PHYSICAL, 2009, 156 (01) : 201 - 207