Three-dimensional x-ray diffraction nanoscopy

被引:0
作者
Nikulin, Andrei Y. [1 ]
Dilanian, Ruben A. [1 ]
Zatsepin, Nadia A. [1 ]
Muddle, Barry C. [2 ]
机构
[1] Monash Univ, Sch Phys, ARC Ctr Excellence Coherent XRay Sci, Clayton, Vic 3800, Australia
[2] Monash Univ, Dep Mat Engn, Clayton, Vic 3168, Australia
来源
INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING II | 2008年 / 7042卷
基金
澳大利亚研究理事会;
关键词
3D diffraction; nano-structures; coherent x-rays; phase-retrieval; imaging;
D O I
10.1117/12.795955
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A novel approach to x-ray diffraction data analysis for non-destructive determination of the shape of nanoscale particles and clusters in three-dimensions is illustrated with representative examples of composite nanostructures. The technique is insensitive to the x-rays coherence, which allows 3D reconstruction of a modal image without tomographic synthesis and in-situ analysis of large (over a several cubic millimeters) volume of material with a spatial resolution of few nanometers, rendering the approach suitable for laboratory facilities.
引用
收藏
页数:10
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