Anisotropic electrical properties of epitaxial Hf-doped Bi4Ti3O12 thin films on (100)- and (111)-oriented SrTiO3 substrates

被引:3
作者
Zhu, J. [1 ]
Wang, X. P. [1 ]
Luo, W. B. [1 ]
Li, Y. R. [1 ]
机构
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
来源
18TH INTERNATIONAL VACUUM CONGRESS (IVC-18) | 2012年 / 32卷
关键词
Thin film; Pulsed laser deposition; Bi4Ti3O12; FERROELECTRIC PROPERTIES; BISMUTH TITANATE; BI4TI3O12; FATIGUE; DEPENDENCE; DEPOSITION; MEMORIES;
D O I
10.1016/j.phpro.2012.03.660
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Epitaxial thin films of (001)- and (104)-oriented Bi4Ti3-xHfxO12(BTH) have been fabricated on (100)- and (111)-oriented SrTiO3 substrates with SrRuO3 bottom electrodes by pulsed laser deposition, respectively. X-ray diffraction scans revealed that a unique epitaxial relationship between film and substrate: BTH (001) //SrTiO3 (001); BTH [1-10]// //SrTiO3 [100] is valid for both orientations, irrespective of their orientation. The strong dependences of ferroelectric properties on the film orientation were observed. The remanent polarization 2Pr is 45.6 mu C/cm2 for (104)-oriented BTH film, while 2Pr is 4.5 mu C/cm2 for (001)-oriented BTH film. The anisotropic properties of BTH are similar to that of pure Bi4Ti3O12(BIT): the polarization vector of BTH films is close to the a axis, indicating that Hf substitution does not change the orientation dependence of electric properties in BIT. (c) 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of Chinese Vacuum Society (CVS).
引用
收藏
页码:938 / 946
页数:9
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