共 20 条
Anisotropic electrical properties of epitaxial Hf-doped Bi4Ti3O12 thin films on (100)- and (111)-oriented SrTiO3 substrates
被引:3
作者:
Zhu, J.
[1
]
Wang, X. P.
[1
]
Luo, W. B.
[1
]
Li, Y. R.
[1
]
机构:
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
来源:
18TH INTERNATIONAL VACUUM CONGRESS (IVC-18)
|
2012年
/
32卷
关键词:
Thin film;
Pulsed laser deposition;
Bi4Ti3O12;
FERROELECTRIC PROPERTIES;
BISMUTH TITANATE;
BI4TI3O12;
FATIGUE;
DEPENDENCE;
DEPOSITION;
MEMORIES;
D O I:
10.1016/j.phpro.2012.03.660
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Epitaxial thin films of (001)- and (104)-oriented Bi4Ti3-xHfxO12(BTH) have been fabricated on (100)- and (111)-oriented SrTiO3 substrates with SrRuO3 bottom electrodes by pulsed laser deposition, respectively. X-ray diffraction scans revealed that a unique epitaxial relationship between film and substrate: BTH (001) //SrTiO3 (001); BTH [1-10]// //SrTiO3 [100] is valid for both orientations, irrespective of their orientation. The strong dependences of ferroelectric properties on the film orientation were observed. The remanent polarization 2Pr is 45.6 mu C/cm2 for (104)-oriented BTH film, while 2Pr is 4.5 mu C/cm2 for (001)-oriented BTH film. The anisotropic properties of BTH are similar to that of pure Bi4Ti3O12(BIT): the polarization vector of BTH films is close to the a axis, indicating that Hf substitution does not change the orientation dependence of electric properties in BIT. (c) 2012 Published by Elsevier B.V. Selection and/or peer review under responsibility of Chinese Vacuum Society (CVS).
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页码:938 / 946
页数:9
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