Size-selected Copper Nanolclusters For Fabrication Of Isolated Size-controlled Nanostructures

被引：4
作者：
Mondal, Shyamal [1 ]
Jana, S. [1 ]
Bhattacharyya, S. R. [1 ]
机构：
[1] Saha Inst Nucl Phys, Ctr Nanosci & Surface Phys CENSUP, Kolkata 700064, India
来源：
PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS & MATERIAL SCIENCE (RAM 2013) | 2013年 / 1536卷
关键词：
LECBD; AFM; Nanocluster; mono dispersed deposition; nanodots; NANOCLUSTERS;
D O I：
10.1063/1.4810171
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Here we report formation of isolated and mono-dispersed Copper islands of predicted size on Silicon substrate with native oxide and amorphous carbon film by soft landing of size selected nanoclusters using magnetron based gas aggregation type source. Transmission electron microscopy (TEM) and Atomic Force Microscopy (AFM) are done to characterize the structures formed on different substrates. Effect of larger AFM tip-size compared to feature size is discussed.
引用
收藏
页码：203 / 204
页数：2
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