Investigation of the strain relaxation and ageing effect of YBa2Cu3O7-δ thin films grown on silicon-on-insulator substrates with yttria-stabilized zirconia buffer layers

被引：11
作者：
Wang, P
Li, J
Peng, W
Chen, YF
Zheng, DN [1 ]
机构：
[1] Chinese Acad Sci, Natl Lab Superconduct, Inst Phys, Beijing 100080, Peoples R China
[2] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100080, Peoples R China
[3] Yanbei Normal Univ, Dept Phys, Shanxi 037000, Peoples R China
来源：
SUPERCONDUCTOR SCIENCE & TECHNOLOGY | 2006年 / 19卷 / 01期
关键词：
D O I：
10.1088/0953-2048/19/1/009
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The integration of high-temperature superconductors into advanced semiconductor technology is rather intriguing in the microelectronics field. In this paper, we report on YBa2Cu3O7-delta (YBCO) thin films deposited oil silicon-on-Insulator (SOI) Substrates buffered by yttria-stabilized zirconia (YSZ) layers using the in situ Pulsed laser deposition (PLD) technique. The strain in the YBCO films and the ageing effect caused by the thermally induced cracks are carefully studied. It is believed that because of the adoption of the SOI Substrate, the strain in the YBCO films is greatly relaxed and the quality and stability of YBCO films are rather good, which is advantageous to the superconductive devices.
引用
收藏
页码：51 / 56
页数：6
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