POSFET touch sensor with CMOS integrated signal conditioning electronics

被引：26

作者：

Adami, A. ^{[1
]}

Dahiya, R. S. ^{[1
]}

Collini, C. ^{[1
]}

Cattin, D. ^{[2
]}

Lorenzelli, L. ^{[1
]}

机构：

[1] Fdn Bruno Kessler, I-38123 Trento, Italy

[2] Univ Padua, I-36100 Vicenza, Italy

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 188卷

关键词：

POSFET; CMOS; Tactile sensing; Signal conditioning; On-chip electronics; LARGE-AREA;

D O I：

10.1016/j.sna.2012.02.046

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design, fabrication and evaluation of the new version of POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) touch sensing device based tactile sensing chip. Implemented using CMOS (Complementary Metal Oxide Semiconductor) technology, the chip consists of POSFET device and the integrated bias and signal conditioning circuitry. In particular, a high compliance current sink and an output buffer have been integrated to respectively bias the POSFET device and to decouple the sensor from chip output. The performance of tactile sensing chip has been evaluated in the dynamic contact forces range of 0.01-3 N and the sensitivity of POSFET devices (without amplification) is 102.4 mV/N. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：75 / 81

页数：7

共 14 条

[1] Adami A., 2011, TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, P1982, DOI 10.1109/TRANSDUCERS.2011.5969194
[2] Dahiya R. S., 2009, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, P1881, DOI 10.1109/SENSOR.2009.5285684
[3] Dahiya R. S., 2009, 2 INT WORKSH EL DEV, P1
[4] Tactile Sensing-From Humans to Humanoids
Dahiya, Ravinder S.
Metta, Giorgio
Valle, Maurizio
Sandini, Giulio
[J]. IEEE TRANSACTIONS ON ROBOTICS, 2010, 26 (01) : 1 - 20
[5] Piezoelectric oxide semiconductor field effect transistor touch sensing devices
Dahiya, Ravinder S.
Metta, Giorgio
Valle, Maurizio
Adami, Andrea
Lorenzelli, Leandro
[J]. APPLIED PHYSICS LETTERS, 2009, 95 (03)
[6] Flexible ferroelectret field-effect transistor for large-area sensor skins and microphones
Graz, Ingrid
Kaltenbrunner, Martin
Keplinger, Christoph
Schwodiauer, Reinhard
Bauer, Siegfried
Lacour, Stephanie P.
Wagner, Sigurd
[J]. APPLIED PHYSICS LETTERS, 2006, 89 (07)
[7] Coding and use of tactile signals from the fingertips in object manipulation tasks
Johansson, Roland S.
Flanagan, J. Randall
[J]. NATURE REVIEWS NEUROSCIENCE, 2009, 10 (05) : 345 - 359
[8] Complementary logic gates and ring oscillators on plastic substrates by use of printed ribbons of single-crystalline silicon
Kim, Dae-Hyeong
Ahn, Jong-Hyun
Kim, Hoon-Sik
Lee, Keon Jac
Kim, Tae-Ho
Yu, Chang-Jae
Nuzzo, Ralph G.
Rogers, John A.
[J]. IEEE ELECTRON DEVICE LETTERS, 2008, 29 (01) : 73 - 76
[9] OBJECT IMAGING WITH A PIEZOELECTRIC ROBOTIC TACTILE SENSOR
KOLESAR, ES
DYSON, CS
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1995, 4 (02) : 87 - 96
[10] ISFET sensor integrated with a CMOS current sink for signal conditioning
Lorenzelli, L
Martinoia, S
Corrà, M
Soncini, G
[J]. Sensors and Microsystems, 2002, : 370 - 373

← 1 2 →