Finite Element analysis of a shape memory alloy actuator for a micropump

被引：34

作者：

Merzouki, Tarek ^{[1
]}

Duval, Arnaud ^{[2
]}

Ben Zineb, Tarak ^{[3
,4
]}

机构：

[1] Univ Orleans, PRISME, EA4229, F-45072 Orleans, France

[2] INSA Lyon CNRS, LaMCoS, F-69621 Villeurbanne, France

[3] Univ Lorraine, LEMTA, UMR 7563, F-54500 Vandoeuvre Les Nancy, France

[4] CNRS, LEMTA, UMR 7563, F-54500 Vandoeuvre Les Nancy, France

来源：

SIMULATION MODELLING PRACTICE AND THEORY | 2012年 / 27卷

关键词：

Shape memory alloys; Finite Element analysis; Actuator; Micropump; NiTi; THIN-FILMS; NUMERICAL SIMULATIONS; DRUG-DELIVERY; FABRICATION; BEHAVIOR; STRESS; MODEL; PUMP;

D O I：

10.1016/j.simpat.2012.05.006

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

This paper deals with a Finite Element (FE) behavior analysis of a shape memory alloy actuator for a micropump. It is composed of two membranes of NiTi shape memory alloy (SMA) in a martensitic state at room temperature. They have an initial flat shape and are bonded together with an intermediate spacer. The thermal loading allows the actuator to move up and down in the membrane normal direction. A detailed analysis of sensibility to material and geometric parameters of the SMA actuator is undertaken by FE method. The actuation capability and reliability are studied in order to lead to optimal parameters set providing a higher stroke (deflection) with a low heating temperature. The shape memory effect exhibited by these membranes is simulated by means of the phenomenological constitutive law based on Chemisky-Duval model [1,2], and implemented in the Abaqus (R) FE code. The obtained numerical results were detailed proving the ability of the proposed modeling to reproduce the actuator behavior under thermal loading. This analysis showed that it is possible to provide a large stroke for a minimal geometry of the actuator. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：112 / 126

页数：15

共 50 条

[1] Frequency-controlled wireless shape-memory-alloy microactuators integrated using an electroplating bonding process
Ali, M. S. Mohamed
Takahata, K.
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2010, 163 (01) : 363 - 372
[2] A note on size effect in actuating NiTi shape memory alloys by electrical current
An, L.
Huang, W. M.
Fu, Y. Q.
Guo, N. Q.
[J]. MATERIALS & DESIGN, 2008, 29 (07) : 1432 - 1437
[3] Shape-memory alloys: Macromodelling and numerical simulations of the superelastic behavior
Auricchio, F
Taylor, RL
Lubliner, J
[J]. COMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING, 1997, 146 (3-4) : 281 - 312
[4] Shape-memory alloys: Modelling and numerical simulations of the finite-strain superelastic behavior
Auricchio, F
Taylor, RL
[J]. COMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING, 1997, 143 (1-2) : 175 - 194
[5] Carbon nanotube forest growth on NiTi shape memory alloy thin films for thermal actuation
Bayer, B. C.
Sanjabi, S.
Baehtz, C.
Wirth, C. T.
Esconjauregui, S.
Weatherup, R. S.
Barber, Z. H.
Hofmann, S.
Robertson, J.
[J]. THIN SOLID FILMS, 2011, 519 (18) : 6126 - 6129
[6] Shape memory alloys for microsystems: A review from a material research perspective
Bellouard, Yves
[J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2008, 481 : 582 - 589
[7] Thin-film shape-memory alloy actuated micropumps
Benard, WL
Kahn, H
Heuer, AH
Huff, MA
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (02) : 245 - 251
[8] Benard WL, 1997, TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, P361, DOI 10.1109/SENSOR.1997.613659
[9] SHAPE MEMORY ALLOY MICROACTUATORS
BERGAMASCO, M
DARIO, P
SALSEDO, F
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 253 - 257
[10] Busch J., 2005, US Patent, Patent No. [5,061,914, 5061914]

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