Barium silicate modified strontium bismuth tantalate ferroelectric thin films

被引:1
作者
Bozgeyik, Mehmet S. [1 ,2 ,3 ]
机构
[1] Tokyo Inst Technol, Dept Met & Ceram Sci, Meguro Ku, 2-12-1 S7 Ookayama, Tokyo 1528550, Japan
[2] Kahramanmaras Sutcu Imam Univ, Fac Sci & Literature, Dept Phys, TR-46100 Kahramanmaras, Turkey
[3] Kahramanmaras Sutcu Imam Univ, Grad Sch Nat & Appl Sci, Dept Mat Sci & Engn, TR-46100 Kahramanmaras, Turkey
基金
日本学术振兴会;
关键词
Ferroelectric; Strontium bismuth tantalate; Barium silicate; FeRAMs; FeFETs; DIELECTRIC-BREAKDOWN; SRBI2TA2O9; SR0.8BI2.2TA2O9;
D O I
10.1016/j.cjph.2017.11.019
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Novel strontium bismuth tantalate (Sr0.8Bi2.2Ta2O9 (SBT)) modified with 3 and 5 mol% ratio barium silicate (Ba2SiO4) thin films were grown on Pt(100 nm)/Ti(50 nm)/SiO2/Si(100) substrates by spin coating technique. The influence of barium silicate doping in SBT was studied from the view point of changing dielectric and ferroelectric properties like dielectric constant (epsilon(r)) and remnant polarization (P-r). Well crystallized thin films showed convenient ferroelectric properties with comparatively lower P-r in the range between 1.52 and 0.44 mu C/cm(2) and smaller er value of 163. Thus, with such reduced values of P-r and er barium silicate modified SBT offers a useful potential to be used in Ferroelectric Field Effect Transistor (FeFET) type (1T-type) Ferroelectric Random Access Memories (FeRAMs) upon improving insulation properties.
引用
收藏
页码:40 / 45
页数:6
相关论文
共 15 条
  • [11] STRUCTURE REFINEMENT OF COMMENSURATELY MODULATED BISMUTH STRONTIUM TANTALATE, BI2SRTA2O9
    RAE, AD
    THOMPSON, JG
    WITHERS, RL
    [J]. ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 1992, 48 : 418 - 428
  • [12] DIELECTRIC BREAKDOWN IN HIGH-E FILMS FOR ULSI DRAMS
    Scott, J. F.
    Melnick, B. M.
    McMillan, L. D.
    de Araujo, C. A. Paz
    Azuma, M.
    [J]. FERROELECTRICS, 1993, 150 (01) : 209 - 218
  • [13] QUANTITATIVE MEASUREMENT OF SPACE-CHARGE EFFECTS IN LEAD ZIRCONATE-TITANATE MEMORIES
    SCOTT, JF
    ARAUJO, CA
    MELNICK, BM
    MCMILLAN, LD
    ZULEEG, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (01) : 382 - 388
  • [14] Crystal structures and ferroelectric properties of SrBi2Ta2O9 and Sr0.8Bi2.2Ta2O9
    Shimakawa, Y
    Kubo, Y
    Nakagawa, Y
    Kamiyama, T
    Asano, H
    Izumi, F
    [J]. APPLIED PHYSICS LETTERS, 1999, 74 (13) : 1904 - 1906
  • [15] Enhanced ferroelectric properties and lowered processing temperatures of strontium bismuth niobates with vanadium doping
    Wu, Y
    Cao, GZ
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (17) : 2650 - 2652