Barium silicate modified strontium bismuth tantalate ferroelectric thin films

被引:1
作者
Bozgeyik, Mehmet S. [1 ,2 ,3 ]
机构
[1] Tokyo Inst Technol, Dept Met & Ceram Sci, Meguro Ku, 2-12-1 S7 Ookayama, Tokyo 1528550, Japan
[2] Kahramanmaras Sutcu Imam Univ, Fac Sci & Literature, Dept Phys, TR-46100 Kahramanmaras, Turkey
[3] Kahramanmaras Sutcu Imam Univ, Grad Sch Nat & Appl Sci, Dept Mat Sci & Engn, TR-46100 Kahramanmaras, Turkey
基金
日本学术振兴会;
关键词
Ferroelectric; Strontium bismuth tantalate; Barium silicate; FeRAMs; FeFETs; DIELECTRIC-BREAKDOWN; SRBI2TA2O9; SR0.8BI2.2TA2O9;
D O I
10.1016/j.cjph.2017.11.019
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Novel strontium bismuth tantalate (Sr0.8Bi2.2Ta2O9 (SBT)) modified with 3 and 5 mol% ratio barium silicate (Ba2SiO4) thin films were grown on Pt(100 nm)/Ti(50 nm)/SiO2/Si(100) substrates by spin coating technique. The influence of barium silicate doping in SBT was studied from the view point of changing dielectric and ferroelectric properties like dielectric constant (epsilon(r)) and remnant polarization (P-r). Well crystallized thin films showed convenient ferroelectric properties with comparatively lower P-r in the range between 1.52 and 0.44 mu C/cm(2) and smaller er value of 163. Thus, with such reduced values of P-r and er barium silicate modified SBT offers a useful potential to be used in Ferroelectric Field Effect Transistor (FeFET) type (1T-type) Ferroelectric Random Access Memories (FeRAMs) upon improving insulation properties.
引用
收藏
页码:40 / 45
页数:6
相关论文
共 15 条
  • [1] Frequency Dependent Ferroelectric Properties of BaZrO3 Modified Sr0.8Bi2.2Ta2O9 Thin Films
    Bozgeyik, Mehmet S.
    [J]. CHINESE JOURNAL OF PHYSICS, 2013, 51 (02) : 327 - 336
  • [2] Characteristics of metal-ferroelectric-insulator-semiconductor structure using Sr0.8Bi2.2Ta2O9 and Sr0.8Bi2.2Ta2O9-BaZrO3 for ferroelectric gates
    Bozgeyik, Mehmet S.
    Cross, J. S.
    Ishiwara, H.
    Shinozaki, K.
    [J]. MICROELECTRONIC ENGINEERING, 2010, 87 (11) : 2173 - 2177
  • [3] Ferroelectric Properties of BaZrO3 Doped Sr0.8Bi2.2Ta2O9 Thin Films
    Bozgeyik, Mehmet S.
    Cross, Jeffrey S.
    Ishiwara, Hiroshi
    Shinozaki, Kazuo
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (06)
  • [4] Dielectric breakdown strength in sol-gel derived PZT thick films
    Chen, HD
    Udayakumar, KR
    Gaskey, CJ
    Cross, LE
    [J]. INTEGRATED FERROELECTRICS, 1997, 15 (1-4) : 89 - 98
  • [5] Das RR, 2003, JPN J APPL PHYS 1, V42, P162, DOI [10.1143/JJAP.42.162, 10.1143/JJAP.42.1621]
  • [6] Characteristics of LaAlO3 as insulating buffer layers of ferroelectric-gate field effect transistors
    Kang, SK
    Ishiwara, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (11B): : 6899 - 6903
  • [7] Ferroelectric characteristics control of (Bi,La)4Ti3O12 and SrBi2Ta2O9 films by addition of silicates and germanates
    Kawashima, Y
    Kijima, T
    Ishiwara, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (4B): : 2037 - 2040
  • [8] Preparation of ferroelectric thin films using sol-gel solutions dissolved in supercritical carbon dioxide
    Kijima, T
    Ishiwara, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2003, 42 (4B): : L404 - L405
  • [9] Si-substituted ultrathin ferroelectric films
    Kijima, T
    Ishiwara, H
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2002, 41 (6B): : L716 - L719
  • [10] POLARIZATION FATIGUE CHARACTERISTICS OF SOL-GEL FERROELECTRIC PB(ZR0.4TI0.6)O3 THIN-FILM CAPACITORS
    MIHARA, T
    WATANABE, H
    DEARAUJO, CAP
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7A): : 3996 - 4002